Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Dao, Dzung Viet; Nakamura, Kōichi; Thanh, Tung Bui; Saito, Susumu

doi:10.1088/2043-6254/1/1/013001

Cited by 66 publications

(37 citation statements)

References 39 publications

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“…Micro accelerometers and micro gyroscopes are two of the most practical MEMS devices that measure the translational and rotational speed rates of systems, respectively [7,8]. A Coriolis gyroscope, as a micro gyroscope, works based on the generated Coriolis force, and it is classi ed into three major subsets: tuning fork gyroscope [9], beam gyroscope [10], and vibrating ring gyroscope [11].…”

Section: Introductionmentioning

confidence: 99%

Vibrational characteristics of size dependent vibrating ring gyroscope

Karimzadeh

Ahmadian

2018

Scientia Iranica

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Abstract. In this paper, vibrational analysis of a size-dependent micro-ring gyroscope under electrostatic DC voltage is performed. Governing equations of size-dependent micro rings and corresponding nite-element formulation of circular micro ring along with eight half circular sti eners embedded inside the ring are derived based on the modi ed couple stress theory, Hamilton's principle, and in-extensionality approximation. Frequency analysis indicates that the obtained mode shape of the ring gyroscope is slightly di erent from the one previously reported in the literature. Size-dependent behavior of the gyroscope is studied, and related ndings con rm the gap between classic and non-classic natural frequencies and pull-in voltage when the ring thickness is in order of material length scale parameter. Two di erent orientations for the actuation electrodes of the micro-ring gyroscope are implemented, and the e ect of these orientations on the static de ection, pull-in instability, and device frequencies in the sense (45 direction) and drive (0 direction) directions is investigated. Results reveal that the pull-in phenomena take place under lower voltages for 0 and 45 orientation of electrodes in comparison with 0 orientation; frequency split occurs in higher voltages for 0 and 45 orientation. A comparison between nite-element numerical natural frequencies of single ring and previously obtained analytical ones shows excellent agreement.

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Section: Introductionmentioning

confidence: 99%

Vibrational characteristics of size dependent vibrating ring gyroscope

Karimzadeh

Ahmadian

2018

Scientia Iranica

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“…In recent years, much works has been undertaken to implement different techniques for measuring forces with good accuracy and especially for those whose value is below 10 mN. The first "passive" optical sensors using optical fibers integrating of the MEMS (Micro-Electro-Mechanical System) or Bragg gratings proved to be unsuitable owing to of their high hysteresis and the complexity of their response [1][2][3]. Other more promising developments are under way which relate in particular to the use of electrostatic balances [4][5][6]; microbalances with electromagnetic compensation [7] or "active" optical sensors based on the photoelastic effect in a solid state laser [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Traceability of small force measurements and the future international system of units (SI)

Khélifa

Averlant

Himbert

2016

Int. J. Metrol. Qual. Eng.

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Abstract. The unit of force is connected to the international prototype of the kilogramme, unit of mass in the international system of units (SI), via dead weight machines using calibrated masses. However, forces below 10 mN, ubiquitous in nature and in some devices cannot be measured with a traceability to the SI. The measurement, with the uncertainty of these forces has implications for both basic and applied science. Today, many emerging sectors in micro/nanotechnology and biotechnology have started producing and using systems to implement low forces that, for various reasons, require them to be traceable. Also, the revision of the SI, scheduled for 2018 year, of linking the definitions of the kilogramme, the ampere, the kelvin and the mole to fixed numerical values of fundamental constants, has aroused particular interest in the measurement and calibration of small forces. In this paper, we will give some indications of the state of the art on the small force with a focus on the development of a force sensor using a photoelastic crystal as a monolithic solid-state laser. Basically, the force to be measured is applied to the crystal induces a birefringence in the laser medium which in turn manifests itself by the appearance of a splitting between the frequencies associated with the two polarization components of the oscillating laser mode. This difference is then exploited because, within the elastic limit of the crystal, it is proportional to the force acting on the laser.

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“…The term SOI (silicon-on-insulator) refers to a silicon substrate with a single crystalline silicon device layer lying on a buried oxide layer which is set on top of a silicon substrate. This structure is widely used in MEMS because it provides reliable electrical insulation, excellent etching stop and sacrificial layer functions therefore; it increases the fabrication accuracy, process simplicity and device performance [6].The range of deflection and force provided by microactuator increase their functionality in microsystems. A various electrically driven actuators have been investigated for producing a large force and displacement in MEMS [7]- [9].…”

Section: Introductionmentioning

confidence: 99%

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

Kumar¹,

Sharma²

2014

IJMMM

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Abstract-This paper presents design and fabrication of a MEMS thermal actuator using SOI technology. The thermal actuators are used in, micro grippers, micro mirror and switching applications by applying voltage on different contact pads, causing beams with pseudo bimorph characteristics heated, thereby the microactuator can produce lateral motion in plane or out of plane. The narrow or hot arm heats up and expands more than the wide or cold arm deflecting the device toward the cold arm. Thermal actuators are more power efficient than electrostatic actuators. The present work carries the design, fabrication and characterization of the thermal actuator wherein numerical simulation are carried out in COMSOL multiphysics tool and fabrication was done at MUMPS facility MEMSCAP. The simulated results on displacement versus voltage are verified experimentally.

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Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Cited by 66 publications

References 39 publications

Vibrational characteristics of size dependent vibrating ring gyroscope

Vibrational characteristics of size dependent vibrating ring gyroscope

Traceability of small force measurements and the future international system of units (SI)

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

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