Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology 2018
DOI: 10.5772/intechopen.72885
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Micro/Nano Patterning on Polymers Using Soft Lithography Technique

Abstract: Microfabrication is essential in the field of science and technology. The development and innovations in this field are already prominent in the society through microelectronics and optoelectronics. The lithography or transfer of pattern to the substrate/surface of a layer is an important process step in microfabrication and is usually carried out with photolithography. Though photolithography is a well-established technique, it suffers from drawbacks such as limited feature size due to optical diffraction, re… Show more

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Cited by 3 publications
(2 citation statements)
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“…However, their basic microarchitecture was a "grooved" pattern only, which is not as complex as the prototypes produced in this study. Compared with conventional photolithography, soft lithography methods are more high-throughput in the laboratory setting, with wider resolution, lower costs and a variety of pattern-transferring methods 18 . These advantages helped us to fabricate more complex microstructures in our system.…”
Section: Discussionmentioning
confidence: 99%
“…However, their basic microarchitecture was a "grooved" pattern only, which is not as complex as the prototypes produced in this study. Compared with conventional photolithography, soft lithography methods are more high-throughput in the laboratory setting, with wider resolution, lower costs and a variety of pattern-transferring methods 18 . These advantages helped us to fabricate more complex microstructures in our system.…”
Section: Discussionmentioning
confidence: 99%
“…However, it is difficult to maintain the high uniformity of the micro-pillars over large areas. Also, the clustering [174][175][176], self-collapse [177,178], and other phenomena of adjacent micro-pillars during the contact µTP process need to be strictly avoided, which still causes many difficulties.…”
Section: Van Der Waals Contact µTp Techniquementioning
confidence: 99%