The 8th International Electronic Conference on Sensors and Applications 2021
DOI: 10.3390/ecsa-8-11313
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Micro-Oscillator as Integrable Sensor for Structure-Borne Ultrasound

Abstract: Motivated by their functional conformity, micro-cantilever-based MEMS oscillators are investigated in this study as structure-integrable transducers for the acquisition of guided ultrasonic waves in fiber–metal laminates. While acceleration-sensitive oscillators are limited in their maximum frequency, the presented displacement-sensitive oscillator is operated quasi-free in the fashion of a seismometer, making it particularly sensitive for high-frequency displacements above the sensor’s resonance frequency. Th… Show more

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Cited by 6 publications
(12 citation statements)
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“…For structural health monitoring purposes, composite materials can also be fabricated with an integrated sensor network. A micro-oscillator as an integrable sensor for structure-borne ultrasound has been investigated, where the sensor response has been discussed in regard to its usability for SHM [41]. Inefficient integration of these sensors could lead to delamination and debonding between different plies.…”
Section: Foreign Object Embedmentmentioning
confidence: 99%
“…For structural health monitoring purposes, composite materials can also be fabricated with an integrated sensor network. A micro-oscillator as an integrable sensor for structure-borne ultrasound has been investigated, where the sensor response has been discussed in regard to its usability for SHM [41]. Inefficient integration of these sensors could lead to delamination and debonding between different plies.…”
Section: Foreign Object Embedmentmentioning
confidence: 99%
“…The developed sensor node is supposed to be suited to work with two entirely different sensor principles: piezoelectric sensors, as used for several previous investigations on SHM using Guided Ultrasonic Waves (GUW) [18][19][20], as well as with an innovative, piezoresistive Micro-Electro-Mechanical System (MEMS) sensor recently developed for the detection of GUWs in FMLs [21]. Deformation of piezoelectric sensors leads to an accumulation of charges that can be measured as a voltage difference at their electrodes and directly converted by an Analog-to-Digital Converter (ADC) after proper amplification.…”
Section: Sensor Node For Shm Using Ultrasonic Wavesmentioning
confidence: 99%
“…Inertial MEMS (micro electro-mechanical system) sensors, in contrast, are based on excitation in the form of displacements of the housing and can therefore be miniaturized to the technical limits. Moreover, glass as a typical MEMS housing material is acoustically much better adapted to the polymer of FML [ 11 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, unlike these optical techniques, which only have access to the visible surface of a structure, an MEMS sensor can be embedded to capture information from inside a structure. Therefore, the concept of an MEMS seismometer as embeddable vibrometer for the detection of narrow-band bursts, as used for active SHM using GUW, was recently proposed by the authors [ 11 ]. A GUW detection scheme based on this concept requires a sealed MEMS vibrometer that can be integrated into the layered structure of FML without perturbing the propagating GUW.…”
Section: Introductionmentioning
confidence: 99%