Micro-patterning of porous alumina layers with aligned nanopores

Canonica, Michael; Wardle, Brian L.; Lozano, Paulo

doi:10.1088/0960-1317/25/1/015017

Cited by 3 publications

(1 citation statement)

References 30 publications

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“…14 Micropatterns on ceramic surfaces have been conducted by various techniques such as replication. 15 anodization, 16 hydrothermal methods, 17 soft lithography, 18 laser carving, [19][20][21] chemical etching, 22 or powder blasting with the help of PDMS mask. 23 Laser carving is especially useful for machining hard and/or brittle materials with high precision, excellent productivity, and surface quality.…”

Section: Introductionmentioning

confidence: 99%

Micropatterning of alumina tubular membranes via laser carving for enhanced direct air capture

Wang

Gao

Omosebi

et al. 2023

Int J Applied Ceramic Tech

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An approach for preparing and applying micropatterned alumina tubular membranes was developed for improved gas‐liquid contact at low air pressure drop in direct air capture application. The paper demonstrated that the laser carving of micropatterns on the outer surface of the alumina tubular membranes could greatly increase their outer surface area and enhance gas‐liquid turbulence for a reduced diffusion mass transfer resistance. Six kinds of micropattern configurations were fabricated and studied, including random and regular micropatterns. By introducing a 500‐µm solid grid micropattern, the outer surface area doubles and enhances carbon dioxide capture efficiency from 61% to 97% after the membrane was hydrophobically modified with fluoroalkylsilane. The air pressure drop through the tube lumen remained low even when the packing density increased from 382 to 906 m2/m3. The liquid entry pressure of this micropatterned membrane was the same after testing for 220 h running with the help of periodic drying.

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Section: Introductionmentioning

confidence: 99%

Micropatterning of alumina tubular membranes via laser carving for enhanced direct air capture

Wang

Gao

Omosebi

et al. 2023

Int J Applied Ceramic Tech

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Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

et al. 2021

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Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

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Nanoengineered thrusters for the next giant leap in space exploration

et al. 2015

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Micro-patterning of porous alumina layers with aligned nanopores

Abstract: A nanoporous silicon nitride membrane using a two-step lift-off pattern transfer with thermal nanoimprint lithography Bhargav P Nabar, Zeynep Çelik-Butler, Brian H Dennis et al.-Fabrication of polymer nanowires via maskless O2 plasma etching Ke Du, Ishan Wathuthanthri, Yuyang Liu et al.

Cited by 3 publications

References 30 publications

Micropatterning of alumina tubular membranes via laser carving for enhanced direct air capture

Micropatterning of alumina tubular membranes via laser carving for enhanced direct air capture

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Nanoengineered thrusters for the next giant leap in space exploration

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