Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator

Tao, Kai; Wu, Jin; Kottapalli, Ajay Giri Prakash; Chen, Di; Yang, Zhuoqing; Ding, Guifu; Lye, Sun Woh; Miao, Jianmin

doi:10.1016/j.sse.2017.09.006

Cited by 19 publications

(11 citation statements)

References 21 publications

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“…Microactuators convert an electric signal to a mechanical displacement through various methods, such as electrostatic, piezoelectric, thermal, and electromagnetic [19][20][21][22]. Electromagnetic microactuators have drawn much attention recently due to their faster response, larger displacement range, lower operating voltage, simpler structure, lower cost, higher power, and higher motion resolution compared to other models [23][24][25][26]. Tao et al [25] presented a microactuator composed of a diaphragm made of the powdered NdFeB permanent magnet patterned in epoxy resin, S-shaped springs made of nickel, and an electroplated copper microcoil.…”

Section: Introductionmentioning

confidence: 99%

A novel electromagnetic microactuator with a stainless steel mas-spring structure

Tahmasebipour

2022

J. Micromech. Microeng.

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Microactuators are one of the main components of the microelectromechanical and microfluidic systems and play a key role in their development. Many such systems, e.g., micropumps and microvalves, utilize an electromagnetic microactuator with a displacement range of a few micrometers traversed within a few seconds. Most of the electromagnetic microactuators have low lifetime and fracture toughness or low recovery speed. Microactuators with metallic mass-spring structure can overcome the mentioned disadvantages or limitations. This paper presents the design and fabrication of a novel stainless steel electromagnetic microactuator fabricated using micro-wire electrical discharge machining (µWEDM). The microactuator in question consists of a mass-and-spring structure made of 304 stainless steel, a permanent magnet made of NdFeB, and a microcoil. The impacts of the number of turns, distance, and electric current on the magnetic field of the microcoil and the displacement of the microactuator membrane with time have been investigated to determine the microactuator characteristics. The results indicated a displacement of about ±10 (20) μm within 7 s for an electric current of 1100 mA. This microactuator exhibits a faster response compared to the similar microactuators. Consequently, it can be used at higher operating frequencies and, thus, improves the fluid flow in micropumps.

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Section: Introductionmentioning

confidence: 99%

A novel electromagnetic microactuator with a stainless steel mas-spring structure

Tahmasebipour

2022

J. Micromech. Microeng.

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“…Although a large displacement was achieved, they were unable to minimize the size because a conventional bulk magnet was used. On the contrary, Tao et al, fabricated an electromagnetic actuator with a size of several milli-meters by manually assembling a micro permanent magnet which was fabricated by bonding Nd-Fe-B powder with resin [34]. However, the displacement is still limited to 10 µm.…”

Section: Introductionmentioning

confidence: 99%

“…An alternative approach is to fabricate a depositionbased magnet with MEMS process. However, the magnetic flux of a magnetic thin film fabricated from electroplating, pulse laser deposition or sputtering is extremely small because of a high self-demagnetization field caused by its low aspect ratio [33][34][35][36][37][38][39]. The application of such kinds of magnetic thin film is impossible for large displacement actuators.…”

Section: Introductionmentioning

confidence: 99%

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Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator

Wang

Matsuura

Yamada

et al. 2021

J. Micromech. Microeng.

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In this paper, we report an actuator with a magnet made of novel rare earth magnetic powder Sm-Fe-N with diameter of 2 µm to 5 µm. Micro magnets were fabricated by mixing the magnetic powder with wax at temperature of 90 °C. Alignment of the easy axis process was employed to enhance the remanence of the micro magnets. A 8 T strong pulse magnetic field was utilized to magnetize the micro magnets. The properties of magnetic powder were revealed with vibrating sample magnetometer by measuring micro magnets with various magnetic powder weight loading percentages. In the best condition, the remanence reaches 0.9 T and the energy product reaches 70 kJ m−3. After that, the electromagnetic actuator was fabricated by embedding the magnetic powder in deep-reactive-ion-etched Si cavity with wax binder and parylene capping. The completed microelectromechanical system structure was mounted on a four-layer printed circuit board with embedded coils. Upon the application of a direct current for actuation, a displacement of 180 μm was obtained from a device volume of only 1.5 mm3 with a low actuation power consumption of 11.5 mW.

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“…Recent advances in internet of things (IoT) and wireless sensing networks provide new insights into sustainability and availability of new types of micro-energy storage and conversion devices, including MEMS-based micro/nano generators, thermoelectrics and solar cells [1][2][3]. Conventional MEMS-based vibration energy harvesters are capable of transforming mechanical energy into electrical energy through piezoelectric [4][5][6], electromagnetic [7][8][9], electrostatic [10][11][12] and triboelectric mechanisms [13][14][15]. Piezoelectric materials possess a unique merit of direct electromechanical coupling which can efficiently convert mechanical strain into electrical energy and vice versa.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

Tao

Tang

et al. 2019

Surface and Coatings Technology

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115

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Zinc oxide (ZnO) is an environmental-friendly semiconducting, piezoelectric and nonferroelectric material, and plays an essential role for applications in microelectromechanical systems (MEMS). In this work, a fully integrated two-degree-of-freedom (2DOF) MEMS piezoelectric vibration energy harvester (p-VEH) was designed and fabricated using ZnO thin films for converting kinetic energy into electrical energy. The 2DOF energy harvesting system comprises two subsystems: the primary one for energy conversion and the auxiliary one for frequency adjustment. Piezoelectric ZnO thin film was deposited using a radio-frequency magnetron sputtering method onto the primary subsystem for energy conversion from mechanical vibration to electricity. Dynamic performance of the 2DOF resonant system was analyzed and optimized using a lumped parameter model. Two closely located but separated peaks were achieved by precisely adjusting mass ratio and frequency ratio of the resonant systems. The 2DOF MEMS p-VEH chip was fabricated through a combination of laminated surface micromachining process, double-side alignment and bulk micromachining process. When the fabricated prototype was subjected to an excitation acceleration of 0.5 g, two close resonant peaks at 403.8 and 489.9 Hz with comparable voltages of 10 and 15 mV were obtained, respectively.

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Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator

Cited by 19 publications

References 21 publications

A novel electromagnetic microactuator with a stainless steel mas-spring structure

A novel electromagnetic microactuator with a stainless steel mas-spring structure

Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator

Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

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