Micro-punching process based on spallation delamination induced by laser driven-flyer

Advances in test and measurement of the interface adhesion and bond strengths in coating-substrate systems, emphasising blister and bulk techniques

“…The phenomenon observed that laser pulsed shockwave spallation induces thin film de-bonding and local rupturing has also been exploited for the nanofabrication of microstructures. As an example, a pattern of micro square, circular and star-shaped holes was created in an Au-film coated on polyimide and K9 glass substrates, as shown in Fig.18, using a micro-mould with similar shaped holes [144] (i.e. similar to a photomask technique in the optical lithography).…”

“…Schematic of spallation de-bonding induced by laser driven-flyer (absorbing layer) shockwave for micro-punching process in (a) and the punched a pattern of micro holes on the film in (b)[144].…”

Mold-free fs laser shock micro forming and its plastic deformation mechanism

“…Until now, ns lasers have been widely used in laser shock microforming [5][6][7][8][9] .In fact, fs lasers with shorter pulses can induce shock waves with much higher pressure than ns lasers. For direct ablation by fs laser, strong shock wave with a peak pressure of tens to hundreds of GPa can easily be obtained [11][12][13][14].…”

“…Laser shock forming-a non-thermal laser forming method that has the advantages of non-contact, tool-free, high efficiency, and high precision-has been successfully introduced into micro manufacturing and has been reported as having great importance [5][6][7][8][9][10]. Generally, there are two categories of laser shock forming: with mold [5][6][7][8] and without mold [4,[9][10].…”

“…Generally, there are two categories of laser shock forming: with mold [5][6][7][8] and without mold [4,[9][10]. For the former, the maximal horizontal size of the formed microstructure is determined by the mold, and the laser parameters are the main influence on the vertical size.…”