Micro Raman Spectroscopy Analysis of Doped Amorphous and Microcrystalline Silicon Thin Film Layers and its Application in Heterojunction Silicon Wafer Solar Cells
Abstract:Hydrogenated p+ and n+ doped silicon thin films deposited using radio frequency (13.56 MHz) plasma-enhanced chemical vapour deposition (PECVD) are studied in detail using micro Raman spectroscopy to investigate the impact of doping gas flow, hydrogen dilution ratio, film thickness, and substrate type on the doped silicon thin film characteristics. In particular, by deconvoluting the micro Raman spectra into amorphous and crystalline components, quantitative and qualitative information on bond angle disorder, b… Show more
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