Micro-scratch test of DLC films on Si substrates prepared by bipolar-type plasma based ion implantation

Nakao, Setsuo; Kim, J.; Choi, Junho; Miyagawa, S.; Miyagawa, Y.; Ikeyama, M.

doi:10.1016/j.surfcoat.2006.08.152

Cited by 16 publications

(11 citation statements)

References 8 publications

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“…Coating adhesion is measured as a correlation between the occurrences of critical load at the coating failure instant. In the event of an adhesive failure, this critical normal load is taken as a measure of the coatingsubstrate interface adhesion or used to calculate the work of adhesion [16,17]. During a scratch test, a spherical indenter tip slides over the surface of the coating to generate a groove at an incremental or constant normal load mode.…”

Section: Coating Adhesion and Scratch Testingmentioning

confidence: 99%

Coating thickness and interlayer effects on CVD-diamond film adhesion to cobalt-cemented tungsten carbides

Gómez

Xiao

et al. 2013

Surface and Coatings Technology

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Section: Coating Adhesion and Scratch Testingmentioning

confidence: 99%

Coating thickness and interlayer effects on CVD-diamond film adhesion to cobalt-cemented tungsten carbides

Gómez

Xiao

et al. 2013

Surface and Coatings Technology

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“…Also, academic studies mostly mention only one way to find critical normal force L (the normal force at which failure occurs), in contrast with multiple ways defined by standards [8,[20][21][22][23][24][25].…”

Section: International Standards For Evaluation Of Adhesionmentioning

confidence: 99%

“…1. Basic idea behind a fuzzy system is to interpret an input, and based on sets of if-then rules, obtain an output or due to the application of nonstandard conditions [5,[20][21][22][23][24][25]. One option in the recent situation is the use of the standards with the addition of prescribed measurement procedures and conditions.…”

Section: Introductionmentioning

confidence: 99%

The Evaluation of the Practical Adhesion Strength of Biocompatible Thin Films by Fuzzy Logic Expert System and International Standards

Socha¹,

Kutílek²,

Vítečková³

2013

Journal of Electrical Engineering

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This work focuses on describing an evaluation method used in nano-and micro-thin films based on fuzzy logic expert systems. The aim is the elimination of comparison complications with mechanical properties of tin films, practical adhesion being one of the most important characteristic of tin films. The basic method for evaluating the practical adhesion strength is scratch test method, while the issue is that research teams use measurement methods based on the non-uniform measurement conditions of adhesion of biocompatible thin films. The authors tested new evaluation method and procedure based on international standards and fuzzy rule based expert system in order to eliminate the problem of comparison of practical adhesion of the films. The article concentrates on testing and using the fuzzy logic expert system designed based on international standards for evaluating adhesion of thin films in nano and micro dimensions. The materials used for tests of the fuzzy expert system were DLC biocompatible layers and substrate a titanium alloy Ti6Al4V.

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“…Due to this advantage, many researchers have employed this technique and a lot of investigations have been performed on the preparation of DLC films. In our laboratory, DLC films are also prepared by a bipolar-type PBII system developed by AIST-Chubu [2] and the microstructure and adhesion property were examined [3,4].…”

mentioning

confidence: 99%

“…In the PBII and other low-pressure plasma processes, hydrocarbon source gases, such as methane (CH 4 ) [5,6,11,12], acetylene (C 2 H 2 ) [6-9, 11], toluene (C 7 H 8 ) [3][4][5][8][9][10] and others [11], are usually employed to the deposition of DLC films. In addition, a mixture of them is used sometimes [5,9].…”

mentioning

confidence: 99%

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

Nakao

Choi

Kato

2008

Phys. Status Solidi (c)

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Diamond‐like carbon (DLC) films are deposited on Si substrates using acetylene (C2H2), toluene (C7H8) and their mixed gas, and the microstructures are examined by micro‐Raman spectroscopy, Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD) analysis as a function of negatively pulsed voltages (Vn). It is found that the formation of graphite‐like structure (aromatic ring clustering) is enhanced with increasing Vn. In addition, the density of the films is increased up to approximately 2.0 g/cm3 and the H concentration is decreased with increasing Vn. The use of C2H2 has much effect on the formation of graphite‐like structure and the reduction of H concentration in the films at high Vn as compared with others. The deposition rate of the films is increased with increasing Vn. Relatively high deposition rate is obtained when using C7H8. In the case of the mixed gas, the deposition rate is found to be close to that of C7H8. These results suggest that C7H8 is dominant to the deposition process when using the mixture of C2H2 + C7H8. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Micro-scratch test of DLC films on Si substrates prepared by bipolar-type plasma based ion implantation

Cited by 16 publications

References 8 publications

Coating thickness and interlayer effects on CVD-diamond film adhesion to cobalt-cemented tungsten carbides

Coating thickness and interlayer effects on CVD-diamond film adhesion to cobalt-cemented tungsten carbides

The Evaluation of the Practical Adhesion Strength of Biocompatible Thin Films by Fuzzy Logic Expert System and International Standards

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

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