Micro solid immersion lens fabricated by micro-molding for near-field optical data storage

Yee, Youngjoo; Bu, Jong Uk; Cho, Il‐Joo; Yoon, Euisik; Moon, Su-Dong; Kang, Shinill

doi:10.1109/omems.2000.879641

Cited by 3 publications

(1 citation statement)

References 3 publications

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“…Since the time of its introduction, the solid immersion lens has been mainly utilized in the field of near-field magneto-optical data storage. 5,6 This method of solid immersion microscopy relies on a SIL that is mounted on a cantilever and mechanically actuated to maintain the very narrow air gap between the SIL and the sample needed to maximize the resolution of the system. In order to adapt the solid immersion microscope for use in microfluidics, it is necessary to transition away from the cantilever-mounted SIL since its mechanics and size are not easily integrated into microfluidic systems.…”

Section: Introductionmentioning

confidence: 99%

Laser-tweezer-controlled solid immersion lens for high-resolution imaging in microfluidic and biological samples

et al. 2004

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A novel technique is presented which integrates the capacity of a laser tweezer to optically trap and manipulate objects in three-dimensions with the resolution-enhanced imaging capabilities of a solid immersion lens (SIL). Up to now, solid immersion lens imaging systems have relied upon cantilever-mounted SILs that are difficult to integrate into microfluidic systems and require an extra alignment step with external optics. As an alternative to the current state-ofart, we introduce a device that consists of a free-floating SIL and a laser optical tweezer. In our design, the optical tweezer, created by focusing a laser beam through high numerical aperture microscope objective, acts in a two-fold manner: both as a trapping beam for the positioning and alignment of the SIL and as an near-field scanning beam to image the sample through the SIL. Combining the alignment, positioning, and imaging functions into a single device allows for the direct integration of a high resolution imaging system into microfluidic and biological environments.

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Section: Introductionmentioning

confidence: 99%

Laser-tweezer-controlled solid immersion lens for high-resolution imaging in microfluidic and biological samples

et al. 2004

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A Novel Fabrication Method of Microlens Array by Surface Tension and Injection Process

Lin

Hsu

2007

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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MEMS technology for optical data storage

Yee

Lee

et al.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (

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MEMS technology is fast becoming the new enabling technology for areas that require the performance and cost advantages it brings. In this paper, as one of its promising application areas, MEMS technology for a ultra small optical pickup module is presented. The optical flying bead is constructed by integration of micromachined devices such as micro slider, micro coil, microactuator, and micro lens within 0.5 mm in height. The basic optical unit comprised of refractive and dimactive optical elements including LD, PD, polarizers, and collimating lens is built by wafer level stacking within its dimension of 3.0 x 3.0 x 5.5 mm3. By assembling of the optical flying head and the basic optical unit onto a swing arm, it is possible to obtain an ultra small pickup system which can be applied in mobile environment.

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Micro solid immersion lens fabricated by micro-molding for near-field optical data storage

Cited by 3 publications

References 3 publications

Laser-tweezer-controlled solid immersion lens for high-resolution imaging in microfluidic and biological samples

Laser-tweezer-controlled solid immersion lens for high-resolution imaging in microfluidic and biological samples

A Novel Fabrication Method of Microlens Array by Surface Tension and Injection Process

MEMS technology for optical data storage

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