Motivated by the need for torque sensing in the µNm range for experiments with insect-sized flapping-wing robots, we present the design, fabrication and testing of a custom single-axis torque sensor. The micorobots in question are too large for MEMS force/torque sensors used for smaller live insects such as fruit flies, but too small to produce torques within the dynamic range of commercially available force/torque sensors. Our sensor consists of laser-machined Invar sheets that are assembled into a three dimensional beam. A capacitive displacement sensor is used to measure displacement of a target plate when the beam rotates, and the output voltage is correlated to applied torque. Sensor bandwidth, range, and resolution are designed to match the criteria of the robotic fly experiments while remaining insensitive to off-axis loads. We present a final sensor design with a range of ±130µNm, a resolution of 4.5nNm, and bandwidth of 1kHz.
I. INTRODUCTIONWithin the last decade, multiple biologically-inspired robots have been developed at the insect scale, much smaller than traditional macro-scale robots yet larger than truly microscopic technologies such as MEMS (for examples see [1], [2]). The unique scale and operating conditions of these robots mean commercially available experimental tools may not always be sufficient and thus custom designs are required. For example, the robotic fly presented in [1] required the development of a two-axis force sensor to empirically determine lift and drag forces generated by the flapping wings [3].More recent work on the robotic fly includes the use of asymmetric wing flapping motions to generate net body torques [4], where the magnitude of predicted torques is on the order of 1-10µNm. These values were obtained using a quasi-steady blade-element aerodynamic model [5] to predict aerodynamic forces and resulting body torques. To the authors' knowledge, even the most sensitive commercially available torque transducers fall short of the range, resolution and bandwidth demanded for microrobotic experiments. For instance, the Nano17 by ATI Industrial Automation (Apex, NC) offers a torque measurement capacity of 120mNm and a resolution near 16µNm, which is an order of magnitude too large for our application.There have been several published works on the development and manufacture of custom torque sensors for a variety