2002
DOI: 10.1002/sia.1391
|View full text |Cite
|
Sign up to set email alerts
|

Micro‐XPS analysis of slide‐tested TiN films with/without Cl+ implantation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

2
4
0

Year Published

2003
2003
2024
2024

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 15 publications
(6 citation statements)
references
References 7 publications
2
4
0
Order By: Relevance
“…Figure 4(a) demonstrates the XPS spectra of the Ti(2p) core level peak for the samples containing 10% Au annealed at 600 • C. It consists of the Ti(2p 3/2 ) peak at 458.8 eV and the Ti(2p 1/2 ) peak at 464.5 eV. These energy values are close to those reported in the literature for the TiO 2 films, at 458.9 eV and 464.6 eV for the Ti (2p 3/2 ) and Ti (2p 1/2 ), respectively [19,49]. Based on XPS analysis, the formation of TiO 2 film is confirmed after the annealing treatment.…”
Section: Xps Analysissupporting
confidence: 81%
“…Figure 4(a) demonstrates the XPS spectra of the Ti(2p) core level peak for the samples containing 10% Au annealed at 600 • C. It consists of the Ti(2p 3/2 ) peak at 458.8 eV and the Ti(2p 1/2 ) peak at 464.5 eV. These energy values are close to those reported in the literature for the TiO 2 films, at 458.9 eV and 464.6 eV for the Ti (2p 3/2 ) and Ti (2p 1/2 ), respectively [19,49]. Based on XPS analysis, the formation of TiO 2 film is confirmed after the annealing treatment.…”
Section: Xps Analysissupporting
confidence: 81%
“…This is significantly lower (0.9 eV) in binding energy, indicating the highest nitrogen incorporation in the synthesized TiO 2 NPs. The typical binding energy of the Ti 2p 3/2 peak in TiO 2 crystals is 458.5−459.7 eV, which is higher than that in TiN crystals (455.1 eV). …”
mentioning
confidence: 84%
“…The typical binding energy of the Ti 2p 3/2 peak in TiO 2 crystals is 458.5-459.7 eV, which is higher than that in TiN crystals (455.1 eV). [18][19][20][21][22] After doping (when the N atom replaces the O atom out of the lattice), the valence state of the Ti cation can be reduced. The binding energy of the Ti 2p 3/2 peak shifts to lower energies when the valence state of Ti 4+ is reduced to Ti 3+ and Ti 2+ .…”
mentioning
confidence: 99%
“…The reported typical binding energy for Ti2p 3/2 in the titanium crystal ranges between 458.5 and 459.7 eV. 39 A redshi was observed in the binding energy of the Ti2p 3/2 peak of C-dot/TiNR, which occurred due to the formation of Ti 3+ species. 40 The Ti2p 1/2 peak is much broader than Ti2p 3/2 and conrmed the presence of hydrophilic groups on the surface of the C-dots, resulting in the good water solubility.…”
Section: Xps Analysismentioning
confidence: 94%