Microactuators Based on Thin Films

Maeda, Ryutaro; Tsaur, Jiunnjye; Lee, S.H.; Ichiki, Masaaki

doi:10.1007/0-387-23319-9_2

Cited by 8 publications

(3 citation statements)

References 41 publications

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“…Except for micropumps, devices integrating oscillating membranes are extremely common in microsystems, including micro ultrasonic transducers (Jin et al 1999), micromirrors (Maeda et al 2005), as well as micro fluid density sensors (Crescini and Taroni 1998;Defa et al 2002). For each of these systems, their performances are directly dependent upon properly controlling the resonant frequencies.…”

Section: Membrane Selectionmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

297

169

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This paper briefly reviews recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields. A comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations for micro pumping is provided with illustrative diagrams. Then, a comparative study of current mechanical micropump designs highlighting their advantages and limitations for various applications is presented, based on performance criteria such as actuation voltage and power consumption, ranges of operating frequency and maximum flow rate and backpressure. This study compiles and provides some basic guidelines for selection of the actuation schemes and flow rate requirements in biomedical applications. Different micropumps in biomedical applications, such as blood transport and drug delivery also have been reviewed.

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Section: Membrane Selectionmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

297

169

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“…Another area of interest for strain-tuned ferroelectric materials has been the integration of ferroelectric thin films in microelectromechanical systems (MEMS) and microfluidic devices [18,490,491] including micro-cantilever devices for data storage [492] and optical scanning [493], piezoelectric MEMS generators that can convert ambient vibrational energy into electricity [494,495], and microfluidic pumps and mixers [496,497]. Additionally, the ability to use strain to tune the strong electro-optic properties inherent in ferroelectric materials provides promise for their use and integration in wideband Si-integrated photonic circuits [498], high-speed optical switches, and electro-optic waveguide modulators [9,[499][500][501] to create multifunctional devices.…”

Section: Integration Of Strained Ferroelectrics In Microelectronic De...mentioning

confidence: 99%

New modalities of strain-control of ferroelectric thin films

Damodaran¹,

Agar²,

Pandya³

et al. 2016

J. Phys.: Condens. Matter

113

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Ferroelectrics, with their spontaneous switchable electric polarization and strong coupling between their electrical, mechanical, thermal, and optical responses, provide functionalities crucial for a diverse range of applications. Over the past decade, there has been significant progress in epitaxial strain engineering of oxide ferroelectric thin films to control and enhance the nature of ferroelectric order, alter ferroelectric susceptibilities, and to create new modes of response which can be harnessed for various applications. This review aims to cover some of the most important discoveries in strain engineering over the past decade and highlight some of the new and emerging approaches for strain control of ferroelectrics. We discuss how these new approaches to strain engineering provide promising routes to control and decouple ferroelectric susceptibilities and create new modes of response not possible in the confines of conventional strain engineering. To conclude, we will provide an overview and prospectus of these new and interesting modalities of strain engineering helping to accelerate their widespread development and implementation in future functional devices.

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“…Microsensors and microactuators are two major elements of MEMS, whereas microgrippers, micropositioners, microfixtures, micropumps and microvalves are the most well-known applications of microstructures. In designing and manufacturing all of these systems, the actuation unit is the most important part [11][12][13][14]. Microactuators can be designed based on different methods.…”

Section: Introductionmentioning

confidence: 99%

Mechanical properties identification and design optimization of nitinol shape memory alloy microactuators

Salehi¹,

Hamedi²,

Nohouji³

et al. 2013

Smart Mater. Struct.

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Microactuators are essential elements of MEMS and are widely used in these devices. Microgrippers, micropositioners, microfixtures, micropumps and microvalves are well-known applications of microstructures. In this paper, the design optimization of shape memory alloy microactuators is discussed. Four different configurations of microactuator with variable geometrical parameters, generating different levels of displacement and force, are designed and analysed. In order to determine the optimum values of parameters for each microactuator, statistical design of experiments (DOE) is used. For this purpose, the Souza et al constitutive model (1988 Eur. J. Mech. A 17 789-806) is adapted for use in finite element analysis software. Mechanical properties of the SMA are identified by performing experimental tests on Ti-49.8%Ni. Finally, the specific energy of each microactuator is determined using the calibrated model and regression analysis. Moreover, the characteristic curve of each microactuator is obtained and with this virtual tool one can choose a microactuator with the desired force and displacement. The methodology discussed in this paper can be used as a reference to design appropriate microactuators for different MEMS applications producing various ranges of displacement and force.

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Microactuators Based on Thin Films

Cited by 8 publications

References 41 publications

Current micropump technologies and their biomedical applications

Current micropump technologies and their biomedical applications

New modalities of strain-control of ferroelectric thin films

Mechanical properties identification and design optimization of nitinol shape memory alloy microactuators

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