2003
DOI: 10.1038/nmat802
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Microassembly of semiconductor three-dimensional photonic crystals

Abstract: Electronic devices and their highly integrated components formed from semiconductor crystals contain complex three-dimensional (3D) arrangements of elements and wiring. Photonic crystals, being analogous to semiconductor crystals, are expected to require a 3D structure to form successful optoelectronic devices. Here, we report a novel fabrication technology for a semiconductor 3D photonic crystal by uniting integrated circuit processing technology with micromanipulation. Four- to twenty-layered (five periods) … Show more

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Cited by 286 publications
(178 citation statements)
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References 41 publications
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“…6b). [51] Individual InP plates were fabricated by conventional integrated circuit processing, and then robotically stacked and aligned with the nanorobot to form structures of up to 20 layers. An advantage of using microfabricated InP plates over microspheres is that the structure was built one layer at a time rather than one particle at a time.…”
Section: Micromanipulationmentioning
confidence: 99%
“…6b). [51] Individual InP plates were fabricated by conventional integrated circuit processing, and then robotically stacked and aligned with the nanorobot to form structures of up to 20 layers. An advantage of using microfabricated InP plates over microspheres is that the structure was built one layer at a time rather than one particle at a time.…”
Section: Micromanipulationmentioning
confidence: 99%
“…There has been immense interest since the invention of photonic crystals in the science and technology of the photonic crystal and there are various approaches to the question of how to produce such crystals. The fabrication of photonic crystals has been approached using a variety of techniques, such as directed colloidal crystallization on patterned surfaces [2], micromanipulation using a micromechanical laser [3] or optoelectronic tweezers [4], colloidal self-assembly via DNA hybridization [5] and microstructures produced by using conventional microelectronic photolithography [6].…”
Section: The Concept Of a Photonic Crystalmentioning
confidence: 99%
“…4 A nanobeam type photonic crystal (PhC) nanocavity was shown to still operate as a laser after being transferred to a flexible substrate. 5 The individual micromanipulation and aligned stacking of small-area nanopatterned structures has yielded three-dimensional (3D) PhCs, 6 which recently led to the demonstration of the coupling of a quantum dot (QD) to a 3D PhC cavity 7 and subsequently to the first 3D PhC nanolaser. 8 An individual planar PhC nanocavity has been transferred from the original wafer and subsequently employed as a micromanipulated device for coupling to QDs that reside on a foreign substrate.…”
Section: Introductionmentioning
confidence: 99%