Microcantilever array sensors with integrated PDMS microfluidics

Abstract

We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multiple MCL arrays. We illustrate biosensing with biotin/streptavidin as a model system, and demonstrate an integrated on-chip pump with a MCL array. I.INTRODUCTION Microcantilevers (MCLs) have attracted significant interest as biosensors [1], in part because of their label-free approach to sensing. We have recently developed a new inplane photonic technique to simultaneously read out an array of MCLs on a single chip [2][3][4][5]. In this paper we briefly review operation of our transduction method, followed by the status of array scale up and PDMS integration with MCL arrays. We discuss PDMS-to-silicon bonding, a new transient deflection phenomena and how to avoid it, biotin/streptavidin as a simple model system, and integration of an on-chip PDMS pump.