Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD

Klein, Susanne; Repmann, T.; Brammer, T.

doi:10.1016/j.solener.2004.08.029

Cited by 50 publications

(17 citation statements)

References 42 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Several researchers have previously compared the properties of Si films prepared by HWCVD and PECVD. [23][24][25] However, there are few reports about the crystalline evolution of the HWCVD Si films. In order to give a more comprehensive view, the growth mechanism of HWCVD poly-Si films was probed and interpreted by both the Raman and TEM examinations.…”

Section: Resultsmentioning

confidence: 99%

Incubation Effects upon Polycrystalline Silicon on Glass Deposited by Hot‐Wire CVD

Lien

Mao

et al. 2007

Chemical Vapor Deposition

View full text Add to dashboard Cite

A growth mechanism diagnosis for high-rate, polycrystalline silicon deposition using hot-wire CVD is explored in this article. The effects of various deposition parameters on the Si film growth are investigated by Raman spectroscopy and transmission electron microscopy (TEM) measurements, with special attention paid to the crystalline and amorphous phases. It is found that the H 2 /SiH 4 ratio and substrate temperature (T s ) are the essential process parameters in determining the crystalline phase and the incubation thickness of the as-deposited Si film. Under low hydrogen dilution conditions, an amorphous incubation layer was formed and degraded the crystalline fraction of the Si film. The incubation thickness prior to the nucleation decreases with the increase of the hydrogen dilution ratio. Under higher H 2 /SiH 4 ratios (≥50), the amorphous phase deposited on the substrate could be etched selectively by the atomic hydrogen. As a consequence, nucleation of small crystallite occurs directly on the substrate. At low substrate temperatures, the deposition process shows the disadvantages of small grain size and low crystallinity. The poly-Si film can be deposited from the seed layer under high T s conditions (>350°C) where the Si appears singly crystallized at the initial stage and then grows epitaxially.

show abstract

Section: Resultsmentioning

confidence: 99%

Incubation Effects upon Polycrystalline Silicon on Glass Deposited by Hot‐Wire CVD

Lien

Mao

et al. 2007

Chemical Vapor Deposition

View full text Add to dashboard Cite

show abstract

“…The light is collected through the glass. The tandem solar cell takes the vantage of different regions of high light harvesting efficiency of the two Algorithm 2 Multi-objective oriented methodology Namely instead of cutting thick wafers of polycrystalline Si and then using them to build the device, the layers are subsequently grown using the Plasma-assisted chemical vapour deposition technique [42]. This makes possible to design devices with a Si layer (more generally the absorber layer) thickness of the μm order, which is 2 order of magnitude less then previously used devices.…”

Section: Thin-film Silicon Solar Cellmentioning

confidence: 99%

Enhancing quantum efficiency of thin-film silicon solar cells by Pareto optimality

et al. 2018

View full text Add to dashboard Cite

We present a composite design methodology for the simulation and optimization of the solar cell performance. Our method is based on the synergy of different computational techniques and it is especially designed for the thin-film cell technology. In particular, we aim to efficiently simulate light trapping and plasmonic effects to enhance the light harvesting of the cell. The methodology is based on the sequential application of a hierarchy of approaches: (a) full Maxwell simulations are applied to derive the photon's scattering probability in systems presenting textured interfaces; (b) calibrated Photonic Monte Carlo is used in junction with the scattering matrices method to evaluate coherent and scattered photon absorption in the full cell architectures; (c) the results of these advanced optical simulations are used as the pair generation terms in model implemented in an effective Technology Computer Aided Design tool for the derivation of the cell performance; (d) the models are investigated by qualitative and quantitative sensitivity analysis algorithms, to evaluate the importance of the design parameters considered on the models output and to get a first order descriptions of the objective space; (e) sensitivity analysis results are used to guide and simplify the optimization of the model achieved through both Single Objective Optimization (in order to fully maximize devices efficiency) and Multi Objective Optimization (in order to balance efficiency and cost); (f) Local, Global and "Glocal" robustness of optimal solutions found by the optimization algorithms are statistically evaluated; (g) data-based Identifiability Analysis is used to study the relationship between parameters. The results obtained show a noteworthy improvement with respect to the quantum efficiency of the reference cell demonstrating that the methodology presented is suitable for effective optimization of solar cell devices.

show abstract

“…This is especially critical if the substrate is placed near the filament, as is the case when increased deposition rates are desired. In the HW regime, high deposition rates have been obtained for individual layers [36] but higher solar cell efficiencies, up to 9.4%, have been produced only at low rates [37]. The most promising results have, to date, been obtained when combining hot wire with VHF PECVD, with conversion efficiencies up to 8.1% at 12 Å /s [38].…”

Section: Philosophical Magazinementioning

confidence: 99%

Limiting factors in the fabrication of microcrystalline silicon solar cells and microcrystalline/amorphous (‘micromorph’) tandems

Meillaud

Feltrin

Dominé

et al. 2009

Philosophical Magazine

View full text Add to dashboard Cite

Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD

Cited by 50 publications

References 42 publications

Incubation Effects upon Polycrystalline Silicon on Glass Deposited by Hot‐Wire CVD

Incubation Effects upon Polycrystalline Silicon on Glass Deposited by Hot‐Wire CVD

Enhancing quantum efficiency of thin-film silicon solar cells by Pareto optimality

Limiting factors in the fabrication of microcrystalline silicon solar cells and microcrystalline/amorphous (‘micromorph’) tandems

Contact Info

Product

Resources

About