Microelectrode Array Supported by Microfluidic Channel for High-Throughput Sensing: Fabrication and Characterization

Abstract

The fabrication and characterisation of a microelectrode array supported by microfluidic channels for electroanalytical application are described in this paper. An array of 306 gold recessed microelectrodes (45 µm diameter) was fabricated using lithography, metallisation and oxygen plasma treatment processes. Electroplating and electron-beam metallisation of the electrodes resulted in different surface roughness values. Characterisation of the electrodes showed that those roughness differences had an influence on the response of the array. The array activity was improved by increasing the surface roughness from 0.88 nm to 9.76 nm. Microdevice characterisation, using cyclic voltammetry showed well behaved microelectrodes.