Microfabricated transition-edge X-ray detectors

Hilton, G. C.; Martinis, John M.; Irwin, K. D.; Bergren, Norman F.; Wollman, David A.; Huber, M. E.; Deiker, S.; Nam, Sae Woo

doi:10.1109/77.919451

Cited by 71 publications

(42 citation statements)

References 13 publications

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“…1. This "normal metal" boundary condition has been proved to be a requirement for sharp and reproducible transitions [20], [21], since it eliminates edge effects and noise from quasiparticle and vortex fluctuations [22], [23].…”

Section: B Bilayer Definition Through Lithographymentioning

confidence: 99%

Characterization of a Mo/Au Thermometer for ATHENA

Parra-Borderías

Fernández-Martínez

Fàbrega

et al. 2013

IEEE Trans. Appl. Supercond.

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Abstract-The first dark characterization of a thermometer fabricated with our Mo/Au bilayers to be used as a transition edge sensor is presented. High-quality, stress-free Mo layers, whose thickness is used to tune the critical temperature (2c) down to 100 mK, are deposited by sputtering at room temperature (RT) on SÍ3N4 bulk and membranes, and protected from degradation with a 15-nm sputtered Au layer. An extra layer of high-quality Au is deposited by ex situ e-beam to ensure low residual resistance. The thermometer is patterned on a membrane using standard photolithographic techniques and wet etching processes, and is contacted through Mo paths, displaying a sharp superconducting transition (a « 600). Results show a good coupling between Mo and Au layers and excellent Tc reproducibility, allowing to accurately correlate <1MO an d Tc-Since d^u is bigger than |M for all analyzed samples, bilayer residual resistance can be modified without affecting Tc-Finally, first current to voltage measurements at different temperatures are measured and analyzed, obtaining the corresponding characterization parameters.

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Section: B Bilayer Definition Through Lithographymentioning

confidence: 99%

Characterization of a Mo/Au Thermometer for ATHENA

Parra-Borderías

Fernández-Martínez

Fàbrega

et al. 2013

IEEE Trans. Appl. Supercond.

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“…After deposition, the bilayer squares are defined to the desired size (between 100 m and 200 m in this work) by optical photolithography using a positive photoresist mask. Later, Au banks are added to ensure sharp transitions in the devices [13]. Finally, Nb pads and wiring are fabricated by DC sputtering and a lift-off process.…”

Section: A Tes Fabricationmentioning

confidence: 99%

Development of Cryogenic X-Ray Detectors Based on Mo/Au Transition Edge Sensors

Pobes

Fàbrega

Camón

et al. 2017

IEEE Trans. Appl. Supercond.

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Abstract-We report on the development of Mo/Au based Transition Edge Sensors (TESs) aimed at soft X-ray detection. TESs of different sizes with T c~1 00 mK and very narrow transitions have been fabricated. Dark characterization based on I-V, complex impedance and noise measurements has allowed us to obtain their basic functional parameters at different bath temperatures and operating points. Electrodeposited Bi films, to be used as X-ray absorbers, have been developed and characterized.  Index Terms-Transition Edge Sensors, X-ray spectroscopy, proximity effect, radiation detectors

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“…A single TES pixel consists of an about 300-nm-thick superconducting Mo/Cu bilayer with a critical temperature T C around 100 mK. The 500-nm-thick normal-metal Cu strips are deposited on top of the bilayer to suppress local T C variation at the edges [20] and to suppress noise [21]. The absorber, coupled directly to the superconducting film, is a 350 × 350 × 2.5 μm 3 bismuth block.…”

Section: Experiments a Detector Setupmentioning

confidence: 99%

Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays: Extending the Limits of Nondestructive Analysis

et al. 2016

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Nondestructive analysis (NDA) based on x-ray emission is widely used, for example, in the semiconductor and concrete industries. Here, we demonstrate significant quantitative and qualitative improvements in broadband x-ray NDA by combining particle-induced emission with detection based on superconducting microcalorimeter arrays. We show that the technique offers great promise in the elemental analysis of thin-film and bulk samples, especially in the difficult cases where tens of different elements with nearly overlapping emission lines have to be identified down to trace concentrations. We demonstrate the efficiency and resolving capabilities by spectroscopy of several complex multielement samples in the energy range 1-10 keV, some of which have a trace amount of impurities not detectable with standard silicon drift detectors. The ability to distinguish the chemical environment of an element is also demonstrated by measuring the intensity differences and chemical shifts of the characteristics x-ray peaks of titanium compounds. In particular, we report measurements of the Kα=Kβ intensity ratio of thin films of TiN and measurements of Ti Kα satellite peak intensities in various Ti thin-film compounds. We also assess the detection limits of the technique, comment on detection limits possible in the future, and discuss possible applications.

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Microfabricated transition-edge X-ray detectors

Cited by 71 publications

References 13 publications

Characterization of a Mo/Au Thermometer for ATHENA

Characterization of a Mo/Au Thermometer for ATHENA

Development of Cryogenic X-Ray Detectors Based on Mo/Au Transition Edge Sensors

Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays: Extending the Limits of Nondestructive Analysis

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