Microfabrication and Characterisation of an Electrostatic MEMS Energy Harvester for Biomedical Applications

Abstract

We present the fabrication process and characterization of a novel Silicon-on-Glass electrostatic MEMS vibration energy harvester. This device is aimed to give supplementary energy to the battery of leadless pacemakers by using the vibrations generated by heartbeat movement. The proposed device is compliant with Leadless Pacemakers requirements: its dimensions are compatible with the 6mmdiameter capsules of leadless pacemakers for catheterism, and the materials composing the device are not ferromagnetic, allowing MRI imaging of implanted patients.