Microfabrication and characterization of fully programmable optical MEMS gratings with long low-stress micro-mirrors

Timotijević, B.; Tormen, M.; Lockhart, R.; Lutzelschwab, M.; Stanley, R. P.; Zamkotsian, Frédéric; Lanzoni, Patrick; Canonica, Michael; Noell, Wilfried

doi:10.1109/omems.2011.6031052

16th International Conference on Optical MEMS and Nanophotonics 2011

DOI: 10.1109/omems.2011.6031052

|View full text |Cite

Microfabrication and characterization of fully programmable optical MEMS gratings with long low-stress micro-mirrors

B. Timotijević

M. Tormen

R. Lockhart

et al.

Abstract: We have fabricated and characterized fully programmable MEMS diffraction gratings with long, low-stress, low cross-talk and optically flat micro-mirrors, which can be vertically displaced up to 0.7μm.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Publication Types

Select...

Relationship

Self Cite0

Independent0

Authors

Journals

Cited by 0 publications

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

No citations

Set email alert for when this publication receives citations?

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Microfabrication and characterization of fully programmable optical MEMS gratings with long low-stress micro-mirrors

Abstract: We have fabricated and characterized fully programmable MEMS diffraction gratings with long, low-stress, low cross-talk and optically flat micro-mirrors, which can be vertically displaced up to 0.7μm.

Cited by 0 publications

References 6 publications

No citations

Contact Info

Product

Resources

About