Microfabrication and imaging XPS analysis of ITO thin films

Li, Ying; Zhao, Gaoyang; Xing, Zhi; Zhu, Tao

doi:10.1002/sia.2585

Cited by 11 publications

(3 citation statements)

References 14 publications

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“…According to literature survey, ITO analysis are typically based on spectral deconvolution using two sub-peaks—often ascribed to be contribution from crystalline and amorphous ITO. The observed peak shift between crystalline and amorphous phases—1.0 eV for In and 0.9 eV for Sn peaks—was found to stay in agreement with literature survey [ 44 , 45 , 46 ].…”

Section: Resultssupporting

confidence: 91%

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Bogdanowicz

Niedziałkowski

Sobaszek

et al. 2018

Sensors

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In this work an application of optical fiber sensors for real-time optical monitoring of electrochemical deposition of ketoprofen during its anodic oxidation is discussed. The sensors were fabricated by reactive magnetron sputtering of indium tin oxide (ITO) on a 2.5 cm-long core of polymer-clad silica fibers. ITO tuned in optical properties and thickness allows for achieving a lossy-mode resonance (LMR) phenomenon and it can be simultaneously applied as an electrode in an electrochemical setup. The ITO-LMR electrode allows for optical monitoring of changes occurring at the electrode during electrochemical processing. The studies have shown that the ITO-LMR sensor’s spectral response strongly depends on electrochemical modification of its surface by ketoprofen. The effect can be applied for real-time detection of ketoprofen. The obtained sensitivities reached over 1400 nm/M (nm·mg−1·L) and 16,400 a.u./M (a.u.·mg−1·L) for resonance wavelength and transmission shifts, respectively. The proposed method is a valuable alternative for the analysis of ketoprofen within the concentration range of 0.25–250 μg mL−1, and allows for its determination at therapeutic and toxic levels. The proposed novel sensing approach provides a promising strategy for both optical and electrochemical detection of electrochemical modifications of ITO or its surface by various compounds.

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Section: Resultssupporting

confidence: 91%

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Bogdanowicz

Niedziałkowski

Sobaszek

et al. 2018

Sensors

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show abstract

“…XPS characterizations were carried out, as shown in Fig. 4, showing that the binding energy peaks at about 451.9 eV and 444.3 eV belong to In 3d 3/2 and In 3d 5/2 of ITO 19 respectively, while the binding energy peaks at 37.5 eV and 35.3 eV belong to W4f 5/2 and W4f 7/2 20 of WO 3 , respectively. Therefore, we can conclude that the composite films feature the ITO nanocrystals embedded in the amorphous WO 3 matrix.…”

Section: Resultsmentioning

confidence: 99%

Improvement of Electrochromic Performance by Embedding ITO Nanocrystals in Amorphous WO₃ Film

Liu

Yuan

Hua

et al. 2019

ECS J. Solid State Sci. Technol.

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The electrochromic films featuring the well dispersed ITO nanocrystal (about 10 nm) in amorphous WO 3 (ITO@WO 3 ) have been successfully fabricated with a solution process. The structure and electrochromic properties of the as-prepared films were studied by high resolution transmission electron microscope, scanning electron microscope, X-ray photoelectron spectroscopy, X-ray diffraction, and electrochemical methods. The measured coloration/bleach time decreases from 10.5/27.8 s to 5.7/0.9 s with the increasing of ITO/AMT ratio indicating that embedded ITO nanocrystals induce the nanocrystal/glassy interface effect remarkably improving the ion diffusion coefficient and electrochemical activity. The optimal T at 633 nm of 0.1 ITO@WO 3 films is about 53.80% much higher than that of pure WO 3 (about 42.09%). But in near-infrared (NIR) range the pure WO 3 films show the best transmittance modulation rather than the composite films. The above stated results are indicative that the interface effects of embedded ITO nanocrystals play the key role while its plasmon-induced electrochromic effects are limited because of not only excellent NIR modulation capability of amorphous WO 3 itself but also the relative large size of ITO nanocrystals used, demonstrating that smaller nanocrystal size (∼5 nm) are required for better electrochromic performance of the composite films.

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“…[ 28 ] Moreover, X‐ray photoelectron spectroscopy (XPS) of the ITO@LGLZO pellet displayed only the characteristic peaks of ITO, as evidenced by In 3d (444.35 eV) and Sn 3d (486.36 eV) spectra (Figure S3, Supporting Information). [ 29 ] In addition, the characteristics associated with LGLZO are not observed, illustrating that the pellet has been completely covered with an ITO layer. It is observed from the cross‐sectional SEM image and energy dispersive X‐ray spectrometry (EDS) results of ITO@LGLZO (Figure 2d; Figure S4, Supporting Information), an ITO layer with a thickness of ≈700 nm was tightly adhered to LGLZO pellet and filled the voids near the surface.…”

Section: Resultsmentioning

confidence: 99%

Constructing a Multifunctional Interlayer toward Ultra‐High Critical Current Density for Garnet‐Based Solid‐State Lithium Batteries

Gao

Gong

et al. 2023

Adv Funct Materials

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All‐solid‐state lithium batteries (ASSLBs), exhibiting great advantages of high energy density and safety, are proposed to be the next generation energy storage system. However, the successful commercialization of garnet‐based ASSLBs is hindered by the poor contact between solid‐state electrolytes (Li6.25Ga0.25La3Zr2O12, LGLZO) and lithium anode, as well as low critical current density (CCD). Herein, an indium tin oxide (ITO) layer is prepared on LGLZO by ultrasonic spraying technique, where ITO reacts with molten lithium to form a composite interlayer, consisting of Li13In3, Li2O, and LiInSn. Experiments and density functional theory calculations demonstrate that such a unique interlayer plays a multifunctional role in achieving simultaneously better interface wettability, uniform Li deposition, and dendrite suppression at Li/LGLZO interface. Consequently, the CCD of ITO‐treated symmetric cell is increased to a record‐high value of 12.05 mA cm−2 at room temperature, which is expected to promote practical application of ASSLBs. Moreover, the Li/ITO@LGLZO/Li cell exhibits a low interfacial resistance of only 5.9 Ω cm2 and performs stable electrochemical operations for over 2000 h at 2 mA cm−2. The Li/ITO@LGLZO/LiFePO4 full cell also delivers superior electrochemical performances, demonstrating the efficiency of the ITO layer.

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Microfabrication and imaging XPS analysis of ITO thin films

Cited by 11 publications

References 14 publications

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Improvement of Electrochromic Performance by Embedding ITO Nanocrystals in Amorphous WO₃ Film

Constructing a Multifunctional Interlayer toward Ultra‐High Critical Current Density for Garnet‐Based Solid‐State Lithium Batteries

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Microfabrication and imaging XPS analysis of ITO thin films

Cited by 11 publications

References 14 publications

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe

Improvement of Electrochromic Performance by Embedding ITO Nanocrystals in Amorphous WO3 Film

Constructing a Multifunctional Interlayer toward Ultra‐High Critical Current Density for Garnet‐Based Solid‐State Lithium Batteries

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Improvement of Electrochromic Performance by Embedding ITO Nanocrystals in Amorphous WO₃ Film