Microfabrication as a Scientific Tool

Abstract

Research in microfabrication not only serves the microelectronics industry but also can provide research tools for studying the behavior of matter at submicrometer dimensions. A variety of techniques including optical, x-ray, and electron beam lithography and reactive ion etching can be used to make structures, devices, and arrays only hundreds of atoms across. Microfabrication techniques have been applied to experiments on surface-enhanced Raman scattering, transport in one-dimensional conductors, and macroscopic quantum tunneling. Recent progress is extending these techniques to scales of less than 100 angstroms.

Recent progress in SERS biosensing

“…17 A series of subsequent experiments confirmed that noble metal films with roughened surfaces or nanoscale patterns can dramatically increase Raman scattering signals of analytes and produce enhancement factors (EFs) of 10 4 –10 8 over normal Raman scattering. 21, 22 …”

A Modified Micromolding Method for Sub‐100‐nm Direct Patterning of Pd Nanowires

“…The urge to miniaturize electronic circuitry and memory devices originates from demands such as reduced cost of ingredient materials, compactness, low weight and high reliability, and low power requirements, among others 1. As the size of the active device components as well as of the metallic interconnects is projected to decrease well below 100 nm, one of the pertinent questions being addressed is how to cast materials at such small length scales and derive acceptable device characteristics 2. It has been a dream of researchers to learn to cast materials at the nanoscale with the ease and versatility of everyday writing, stamping, or molding where the desired “material ink” is directly deposited.…”

FIB Design for Nanofluidic Applications

“…The use of this method requires the fabrication of a photomask (PM) and the deposition of a photoresist (PR) (Fig. 15.1a), which involve several technological steps: PM conception/realization and PR deposition, baking, insulating, and developing [8]. Typically, nanofluidic channels are made by using a conventional lithography step followed by dry or wet etching to define the depth of the channel [9].…”