2012
DOI: 10.1088/0960-1317/22/8/085017
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Microfabrication of bulk PZT transducers by dry film photolithography and micro powder blasting

Abstract: A facile fabrication process for bulk PZT microsystems using dry film photoresist and micro powder blasting is presented. Bulk PZT and dry film photoresist etching characteristics are evaluated as a function of process parameters and mask dimensions using 127 μm thick PZT substrates. The resulting process simplifies microscale patterning of bulk PZT compared with existing methods, with selection of suitable etching parameter providing excellent etch rate, selectivity and anisotropy. The technique is used to fa… Show more

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Cited by 17 publications
(4 citation statements)
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“…A variety of methods for machining PZT (since we are focusing on bulk polycrystalline materials, rather than sol-gel deposition, for example, the PZT plates must be cut in order to produce the desired shape) have been explored, including diamond saws [11], powder blasting [12], water jet [13], and lasers [14,15] (also, see [12] for an overview of some of these methods). Table 1 compares failure strengths/roughnesses resulting from some of these methods, as well as from the process described in this work.…”
Section: Current State-of-the-artmentioning
confidence: 99%
“…A variety of methods for machining PZT (since we are focusing on bulk polycrystalline materials, rather than sol-gel deposition, for example, the PZT plates must be cut in order to produce the desired shape) have been explored, including diamond saws [11], powder blasting [12], water jet [13], and lasers [14,15] (also, see [12] for an overview of some of these methods). Table 1 compares failure strengths/roughnesses resulting from some of these methods, as well as from the process described in this work.…”
Section: Current State-of-the-artmentioning
confidence: 99%
“…Lead zirconate titanate (PZT) ceramics have important technological applications in nonvolatile memories, actuators, ultrasonic sensors, infrared detectors and electrooptic devices [1][2][3][4][5][6][7][8][9][10][11][12]. PZT solid solutions have attracted special attention since they exhibit an unusual phase boundary, which divides regions with rhombohedral and tetragonal structures, called the morphotropic phase boundary (MPB) by Jaffe et al [1].…”
Section: Introductionmentioning
confidence: 99%
“…In the absence of research about how the beam centroid actually becomes offset due to the process variations, and considering that the beam usually has a high aspect ratio and is fabricated by some manufacturing technology, (18,19) which leads to inclination effects, (20,21) in the actual beam, a trapezoidal beam is utilized here for simplification, as shown in Fig. 6.…”
Section: Coupling Beam Model Under Cross-sectional Area Variationmentioning
confidence: 99%