Microfabrication of Ni-Fe Mold Insert via Hard X-ray Lithography and Electroforming Process

Park, Jae Man; Park, Sung Cheol; Shin, Da Seul; Kim, Jong Hyun; Cho, Hanlyun; Yang, Woo Seok; Son, Seong Ho; Park, Seong Jin

doi:10.3390/met10040486

Cited by 4 publications

(3 citation statements)

References 27 publications

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“…Lithography includes many categories, such as electron beam lithography (EBL) [59], X-ray lithography [60], ion beam lithography (IBL) [19], grayscale lithography, and extreme ultraviolet (EUV) lithography [61]. EBL uses an electron beam to trace a pattern on the resist medium.…”

Section: Fabrication Methods Of Micro-structured Surfaces 21 Lithogra...mentioning

confidence: 99%

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Zhang

Cao

et al. 2023

Processes

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Micro-structured surfaces possess excellent properties of friction, lubrication, drag reduction, antibacterial, and self-cleaning, which have been widely applied in optical, medical, national defense, aerospace fields, etc. Therefore, it is requisite to study the fabrication methods of micro-structures to improve the accuracy and enhance the performance of micro-structures. At present, there are plenty of studies focusing on the preparation of micro-structures; therefore, systematic review of the technologies and developing trend on the fabrication of micro-structures are needed. In present review, the fabrication methods of various micro-structures are compared and summarized. Specially, the characteristics and applications of ultra-precision machining (UPM) technology in the fabrication of micro-structures are mainly discussed. Additionally, the assistive technologies applied into UPM, such as fast tool servo (FTS) technology and slow tool servo (STS) technology to fabricate micro-structures with different characteristics are summarized. Finally, the principal characteristics and applications of fly cutting technology in manufacturing special micro-structures are presented. From the review, it is found that by combining different machining methods to prepare the base layer surface first and then fabricate the sublayer surface, the advantages of different machining technologies can be greatly exerted, which is of great significance for the preparation of multi-layer and multi-scale micro-structures. Furthermore, the combination of ultra-precision fly cutting and FTS/STS possess advantages in realizing complex micro-structures with high aspect ratio and high resolution. However, residual tool marks and material recovery are still the key factors affecting the form accuracy of machined micro-structures. This review provides advances in fabrication methods and assistive technologies of micro-structured surfaces, which serves as the guidance for both fabrication and application of multi-layer and multi-scale micro-structures.

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Section: Fabrication Methods Of Micro-structured Surfaces 21 Lithogra...mentioning

confidence: 99%

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Zhang

Cao

et al. 2023

Processes

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“…Among them, the electrodeposited technology has the characteristics of low cost and industrial production convenience. It has been widely used to fabricate metal MEMS devices [ 7 , 8 , 9 ]. The electroplated Ni coating on carbon fiber can enhance the shielding effect of the sensor, which has the potential application of the MEMS pressure sensor [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Solving the Bonding Problem of the Ni Thin Coating with the Ultrasonic Assisted Electrochemical Potential Activation Method

Zhao

Huo

Li³

2022

Micromachines

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Electroplating nanocrystallite Ni coating can improve the mechanical properties of the metal structure surface, which is widely used in fabricating metal MEMS devices. Because of the large internal compressive stress caused by the oxidation layer of the substrate surface, the Ni coating easily falls off from the substrate surface. To solve this bonding problem, the ultrasonic assisted electrochemical potential activation method was applied. The ultrasonic experiments have been carried out. The bonding strength was measured by the indentation method. The substrate surface oxygen element was tested by the X-ray photoelectron spectroscopy (XPS) method. The dislocation was observed by the TEM method. The compressive stress was tested by the XRD method. The coating surface roughness Ra was investigated by the contact profilometer method. The results indicated that the ultrasonic activation method can remove the oxygen content of the substrate surface and reduce the dislocation density of the electroplating Ni coating. Then, the compressive stress of the electroplated Ni coating has been reduced and the bonding strength has been improved. From the viewpoint of the compressive stress caused by the oxygen element of the substrate surface, mechanisms of the ultrasonic activation method to improve the bonding strength were researched originally. This work may contribute to enhancing the interfacial bonding strength of metal MEMS devices.

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“…Various methods have been proposed for nano-or micro-scale microfabrication techniques. Examples of these methods include removal processing such as etching [1][2][3][4], additional processing such as sputtering [5][6][7][8], composite processing such as the LIGA (named after the German acronym for lithography, electroplating, and molding) process [9][10][11], and assembly processing such as anode bonding [12][13][14]. Each method has its own characteristics and is used flexibly based on the processing accuracy, cost, and material selectivity.…”

Section: Introductionmentioning

confidence: 99%

Research on fabrication method for floating structures using general photolithography with high versatility

Horade¹,

Yamada²,

Yamawaki³

et al. 2021

J. Micromech. Microeng.

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This research reports a micro-fabrication method for plastic microscale structures. Although a stepped shape, such as a cantilever, can be fabricated by micro electro mechanical systems (MEMS) deep etching technology, its disadvantages include the complicated fabrication process and its limited utilization with silicon only. Therefore, in this study, with an aim to address the aforementioned problems, we have realized the fabrication of a multi-stage structure using just a general photolithography process with high versatility. Specifically, it can be manufactured using only SU-8 resist and AZ resist, which are often used in the MEMS process. The AZ resist has the advantage of dissolving in the developer of the SU-8 resist, whether exposed or non-exposed. Thus, the sacrificial layer of AZ resist can be implemented with the SU-8 developer, thereby eliminating the need for dangerous chemicals such as hydrofluoric acid, which is used to etch silicon oxide. Herein, we have derived the optimum conditions by considering in advance the thickness of the AZ resist, the time taken to be etched in SU-8, and the desired features. Based on these optimum processing conditions, the structure could be suspended only in the region where the hole array was patterned. Although methods of using AZ resist as a sacrificial layer and floating SU-8 have been reported, in this study, both floating and fixed structures could be simultaneously fabricated by photolithography only. Accordingly, we successfully manufactured a gear structure and a MEMS sensor, both of which have floating and fixed structures. The above structures are made of highly transparent SU-8 on a glass substrate; hence, they are easily observable with a microscope. The reason for the widespread use of polydimethylsiloxane micro-channels is that they are transparent materials that can be observed under a microscope and fabricated by simple photolithography of the SU-8 resist, enabling non-microfabrication specialists to enter this field. These findings have the potential to form the foundation for developing new biochemical tests, such as actuators and sensors driven under a microscope.

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Microfabrication of Ni-Fe Mold Insert via Hard X-ray Lithography and Electroforming Process

Cited by 4 publications

References 27 publications

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Solving the Bonding Problem of the Ni Thin Coating with the Ultrasonic Assisted Electrochemical Potential Activation Method

Research on fabrication method for floating structures using general photolithography with high versatility

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