Microfabrication of PZT force sensors for minimally invasive surgical tools

Ezhilvalavan, S.; Zhang, Zaoli; Loh, Jeremy; Ying, Jackie Y.

doi:10.1088/1742-6596/34/1/162

Cited by 10 publications

(6 citation statements)

References 13 publications

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“…This feature differs the above described sensor from the other microfabricated PZT sensors, which are usually supported on a Si substrate in the form of cantilever structures. The sensor proposed by Ezhilvalavan aimed to overcomes the issue of substrate clamping effect in distorting the modes of displacements [ 84 ].…”

Section: Application In Medicinementioning

confidence: 99%

Microfabricated Tactile Sensors for Biomedical Applications: A Review

et al. 2014

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During the last decades, tactile sensors based on different sensing principles have been developed due to the growing interest in robotics and, mainly, in medical applications. Several technological solutions have been employed to design tactile sensors; in particular, solutions based on microfabrication present several attractive features. Microfabrication technologies allow for developing miniaturized sensors with good performance in terms of metrological properties (e.g., accuracy, sensitivity, low power consumption, and frequency response). Small size and good metrological properties heighten the potential role of tactile sensors in medicine, making them especially attractive to be integrated in smart interfaces and microsurgical tools. This paper provides an overview of microfabricated tactile sensors, focusing on the mean principles of sensing, i.e., piezoresistive, piezoelectric and capacitive sensors. These sensors are employed for measuring contact properties, in particular force and pressure, in three main medical fields, i.e., prosthetics and artificial skin, minimal access surgery and smart interfaces for biomechanical analysis. The working principles and the metrological properties of the most promising tactile, microfabricated sensors are analyzed, together with their application in medicine. Finally, the new emerging technologies in these fields are briefly described.

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Section: Application In Medicinementioning

confidence: 99%

Microfabricated Tactile Sensors for Biomedical Applications: A Review

et al. 2014

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“…Fabrication of Thin Films: A Lead Zirconium Titanate (Pb 1.25 (Zr 0.52 Ti 0.48 )O 3 ) and the Lead Strontium Zirconium Titanate (Pb 1.23 Sr 0.02 (Zr 0.52 Ti 0. 48)O 3 ) sol-gel solution was prepared, and were spin coated onto platinum-coated silicon substrates [3,6,7]. Coating different layers in different orders made 4 different types of films.…”

Section: Experimental Procedures Amentioning

confidence: 99%

Novel Piezoelectric Tactile Sensor Materials with Improved Properties

Jayashri¹,

Chua²,

Valavan³

2012

SSP

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Lead Zirconium Titanate (PZT) is an example of a piezoelectric material, which can be polarized by an electric field or mechanical stress. This study aims to establish how doping PZT with Strontium will result in PSZT thin films with improved piezoelectric properties for biomedical tactile sensor applications. Various thin film samples were fabricated via sol-gel & spin-coating processing methods-PZT (4 layers), PSZT (4 layers), PSZT-PZT (2L PSZT base-2L PZT) and PZT-PSZT (2L PZT base-2L PSZT), analyzed by X-Ray Diffraction (XRD) and Atomic Force Microscopy (AFM) to determine crystalline structure and surface morphology, and by a ferroelectric analyzer to determine leakage current characteristics and ferroelectric parameters such as Pmax, Prand Vc(representation of piezoelectric properties). The addition of Strontium retains the perovskite structure of PZT and marginally influences the ferroelectric properties. Among the hybrid films, PZT(base)-PSZT showed better ferroelectric characteristics (higher Pmaxand Prvalues). A mathematical relationship between the ferroelectric parameters (Prand Vc) to evaluate the films quality factor in relation to their application as tactile sensors, was also established, from which it was concluded that PZT-PSZT performs much better than the other 3 films for such applications despite high Vcvalues. The improved performance of hybrids may be due to the evolved microstructure and crystalline structure. Present investigation resulted in two important conclusions: PZT-PSZT hybrid films are ideal for tactile sensor applications, and the mathematical relationship developed can be used to evaluate any piezoelectric/ferroelectric materials.

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“…However, the difficulties in stable deposition (e.g., uniformity in wafer scale) and processing have been an important issue for the realization of PZT-MEMS. 14) We have also addressed the fabrication process 15) for PZT-MEMS and developed several devices. [16][17][18] On the other hands, bulk bimorph bending actuators made of sintered ceramics are commercially available and one of the solutions to obtaining a large deflection.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems

Kanda

Inoue

Saito

et al. 2012

Jpn. J. Appl. Phys.

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In this paper, we address the fabrication and characterization of bimorph structures with relatively thick double-layered Pb(Zr,Ti)O3 (PZT) thin films. The PZT/PZT layers are deposited by RF magnetron sputtering. Hysteresis loops of polarization and electrical field for the top and bottom PZT thin films revealed good ferroelectric characteristics with remanent polarization at approximately 20 µC/cm2 and a coersive electric field of about 100 kV/cm. The vibration tests of fabricated bimorph cantilevers during electrical voltage application revealed a twofold displacement compared with single layer driving, and the piezoelectric coefficient value d 31 is estimated to be 13 pm/V. The residual stress difference between the top and bottom layers after the annealing process is calculated to be -0.32 MPa. For a further thickening of the bimorph structure, 6-µm-thick PZT/PZT is also sputtered. The thicker bimorph has a smaller residual stress difference, -30 MPa, between the two layers prepared without the annealing process. The evaluated results demonstrate that the PZT/PZT bimorph structures are applicable to micro-electromechanical systems (MEMS) devices.

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Microfabrication of PZT force sensors for minimally invasive surgical tools

Cited by 10 publications

References 13 publications

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Novel Piezoelectric Tactile Sensor Materials with Improved Properties

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems

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Microfabrication of PZT force sensors for minimally invasive surgical tools

Cited by 10 publications

References 13 publications

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Novel Piezoelectric Tactile Sensor Materials with Improved Properties

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O3Thin Films for Micro-Electromechanical Systems

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Product

Resources

About

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems