Microfibrous Mesh and Polymer Damping of Micromachined Vibration Isolators

Bottenfield, Brent; Bond, Arthur; English, Brian; Flowers, George T.; Dean, Robert N.; Adams, Mark L.

doi:10.1109/tcpmt.2021.3063854

Cited by 5 publications

(7 citation statements)

References 33 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…sions to realize a delicate design [20][21][22][23][24]. Nevertheless, silicon is still imperfect when it comes to large stretching, as a brittle material [31].…”

Section: Structure Designmentioning

confidence: 99%

“…Additionally, a new metamaterial composed of phononic crystal unit-cells was utilized to fabricate a vibration isolator in Yao’s work and showed a −30 dB attenuation level in a certain range of frequency [ 22 ]. Brent et al developed a micro-isolator fabricated from <100> silicon and investigated the transmissibility of the damped and undamped isolators by applying different fibrous meshes [ 23 ]. Regarding the MEMS scanner, Fang et al explored the failure mechanism of an electromagnetic micromirror when it was exposed to vibration [ 24 ] and shock [ 25 ] loads, respectively, and the proposed theoretical model was in good agreement with the experimental results.…”

Section: Introductionmentioning

confidence: 99%

“…In the section “Experiments and Results”, we introduce the measurement method. It is always difficult to detect the slight deformation of the MEMS device, and in [ 21 , 22 , 23 , 24 ], the researchers apply a laser displacement meter that is costly and complex to set up. In this work, we utilize the piezoresistive sensor integrated at the flexure of the micromirror to measure the mechanical load and convert it to a voltage signal received by a data acquisition card.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

View full text Add to dashboard Cite

The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate structure. In this work, a mechanical low-pass filter (LPF) acting as a vibration isolator for a micromirror is proposed. The research starts with the evaluation of vibration influences on the micromirror by theoretical calculation and simulation. The results illustrate that mechanical load concentrates at the slow flexure of the micromirror as it is excited to resonate in second-order mode (named piston mode) in Z-direction vibration. A specific LPF for the micromirror is designed to attenuate the response to high-frequency vibration, especially around piston mode. The material of the LPF is a beryllium-copper alloy, chosen for its outstanding properties of elasticity, ductility, and fatigue resistance. To measure the mechanical load on the micromirror in practical, the on-chip piezoresistive sensor is utilized and a relevant test setup is built to validate the effect of the LPF. Micromirrors with or without the LPF are both tested under 10 g vibration in the Z-direction. The sensor output of the device with the LPF is 35.9 mV in piston mode, while the device without the LPF is 70.42 mV. The attenuation ratio is 0.51. This result demonstrates that the LPF structure can effectively reduce the stress caused by piston mode vibration.

show abstract

“…sions to realize a delicate design [20][21][22][23][24]. Nevertheless, silicon is still imperfect when it comes to large stretching, as a brittle material [31].…”

Section: Structure Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

View full text Add to dashboard Cite

show abstract

“…2. for abbreviations optical setups [12]. The weight of the dosimeter, combined with the typical frequencies of undesirable vibrations, was used to select a compound and thickness of Sorbothane to provide appropriate damping.…”

Section: Vibration Isolationmentioning

confidence: 99%

Simulation-guided development of an optical calorimeter for high dose rate dosimetry

Roberts,

Moggre,

Meyer

et al. 2023

Phys Eng Sci Med

View full text Add to dashboard Cite

Optical Calorimetry (OC) is based on interferometry and provides a direct measurement of spatially resolved absorbed dose to water by measuring refractive index changes induced by radiation. The purpose of this work was to optimize and characterize in software an OC system tailored for ultrahigh dose rate applications and to build and test a prototype in a clinical environment. METHODSA radiation dosimeter using the principles of OC was designed in optical modelling software.Traditional image quality instruments, fencepost and contrast phantoms, were utilized in both software and experimentally in a lab environment to investigate noise reduction techniques and to test the spatial and dose resolution of the system. Absolute dose uncertainty was assessed by measurements in a clinical 6 MV flattening filter free (FFF) photon beam with dose rates in the range 0.2 -6 Gy/s achieved via changing the distance from the source. RESULTSDesign improvements included: equalizing the pathlengths of the interferometer, isolating the system from external vibrations and controlling the system's internal temperature as well as application of mathematical noise reduction techniques. Simulations showed that these improvements should increase the spatial resolution from 22 to 35 lp/mm and achieve a minimum detectable dose of 0.2 Gy, which was confirmed experimentally. In the FFF beam, the absolute dose uncertainty was dose rate dependent and decreased from 2.5 ± 0.8 Gy to 2.5 ± 0.2 Gy for dose rates of 0.2 and 6 Gy/s, respectively. CONCLUSIONSA radiation dosimeter utilizing the principles of OC was developed and constructed. Optical modelling software and image quality phantoms allowed for iterative testing and refinement. The refined OC system proved capable of measuring absorbed dose to water in a linac generated photon

show abstract

“…반면에 고분자는 진동 감쇠 특성이 매우 우수하고 성형이 용이하며 가속도센서의 온도 범위 (-40 ℃ ~ 70 ℃)도 만족시키기 때문에 m-LPF는 고분 자로 구성하는 것이 바람직하다. 지금까지 고분자는 고충격 분야에서 주로 충격 절연기(shock isolator)로 사 용되었고 가속도센서용 m-LPF로의 활용은 매우 제한 적이다 [7] . 고분자는 물성(저장 탄성률(storage modulus), 손실 탄성률(loss modulus) 등)이 시간 혹은 주파수 의 존성을 가지고 [8] , 더불어 저장 탄성률과 손실 탄성률은 형상 인자(Shape Factor, SF)의 영향을 받기 때문에 [9,10] 고분자의 충격 응답 스펙트럼(shock response spectrum) 여기서 와 는 각각 질량과 기저의 변위이다 (Fig.…”

unclassified

Prediction on the Performance of Polymer-Based Mechanical Low-Pass Filters for High-G Accelerometers

Song¹,

Jang²,

Lee³

et al. 2023

J. KIMS Technol

View full text Add to dashboard Cite

A polymer-based mechanical low-pass filter(m-LPF) for high-g accelerometers makes it possible to remove high-frequency transient noises from acceleration signals, thus ensuring repeatable and reliable measurement on high-g acceleration. We establish a prediction model for performance of m-LPF by combining a fundamental vibration model with the fractional derivative standard linear solid(FD SLS) model describing the storage modulus and loss modulus of polymers. Here, the FD SLS model is modified to consider the effect of m-LPF shape factor (i.e., thickness) on storage modulus and loss modulus. The prediction accuracy is verified by comparing the displacement transmissibility(or cut-off frequency) estimated using our model with that measured from 3 kinds of polymers(polysulfide rubber(PSR), silicone rubber(SR), and polydimethylsiloxane(PDMS)). Our findings will contribute a significant growth of m-LPF for high-g accelerometers.

show abstract

Microfibrous Mesh and Polymer Damping of Micromachined Vibration Isolators

Cited by 5 publications

References 33 publications

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

Simulation-guided development of an optical calorimeter for high dose rate dosimetry

Prediction on the Performance of Polymer-Based Mechanical Low-Pass Filters for High-G Accelerometers

Contact Info

Product

Resources

About