Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

Ming, Tan; Huang, Long; Cao, Jiaji; han, zhang; Zhao, Shaoqing; Liu, Minzhe; Jia, Zhongqing; Zhai, Ruizhan; Liu, Hua

doi:10.1364/oe.464192

Cited by 6 publications

(4 citation statements)

References 34 publications

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“…For example, Tan et al combined the advantage of TPP and DMD micro stereolithography (DMDMSL) (TPP-DMDMSL) for hybrid 3D printing (Fig. 2d) 105,106 . The TPP system can produce voxels with a diameter of 400 nm; however, its processing efficiency is low.…”

Section: Hybrid 3d Printing Methodsmentioning

confidence: 99%

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Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Huang,

Hong,

Chen

et al. 2023

gxjzz

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The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness. Therefore, various micro-and nanoprocessing techniques are used to fabricate microoptical elements and systems. Femtosecond laser direct writing (FsLDW) uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication. FsLDW exhibits various excellent properties, including nonlinear multiphoton absorption, high-precision processing beyond the diffraction limit, and the universality of processable materials, demonstrating its unique advantages and potential applications in three-dimensional (3D) micro-nano manufacturing. FsLDW has demonstrated its value in the fabrication of various microoptical systems. This study details three typical principles of FsLDW, several design considerations to improve processing performance, processable materials, imaging/nonimaging microoptical elements, and their stereoscopic systems. Finally, a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.

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Section: Hybrid 3d Printing Methodsmentioning

confidence: 99%

“…Based on hybrid 3D printing technology, Tan et al designed and processed a multifunctional double-sided microfluidic system using SU-8 and PDMS material 105 . Fig.…”

Section: Imaging System Combined With Microfluidicsmentioning

confidence: 99%

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Huang,

Hong,

Chen

et al. 2023

gxjzz

Self Cite

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“…[131] Dawson et al [159] used SU-8 photoresist to fabricate a polymeric waveguide which was integrated with semiconductor nanowire lasers with coupling losses as low as −17 dB(Figure 5a(ii)). To further verify the feasibility of SU-8 photoresist in the preparation of more fine and complex structures, Liu and co-workers [160] from Northeast Normal University prepared microfluidic diffractive optical elements (MFDOEs) by using SU-8 photoresist based on the FsLDW technique (Figure 5a(iii)). This microfluidic diffractive optical element is based on the combination of a multilayer harmonic diffractive surface of photoresist and a liquid, which achieves a diffraction efficiency of more than 90% in the visible band and exhibits achromatic features in both bands at 469 nm (±20 nm) and 625 nm (±20 nm).…”

Section: Su-8 Photoresist and Its Applicationsmentioning

confidence: 99%

Photopolymerized 3D Printing Materials for Optical Elements

Chen,

Ye,

Huang

et al. 2024

Advanced Optical Materials

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The optical element is a key part of manufacturing optoelectronic systems, which can realize functions such as imaging, spectroscopy, image transmission, filtering, and more. The design and manufacture of optical elements is a key issue that restricts its development, and the traditional optical component preparation method is less capable of preparing optical elements with complex structures and multiple materials. As a mature advanced manufacturing technology, photopolymerization 3D printing technology has the advantages of high printing precision and small layer thickness, which plays an important role in the preparation of optical elements. This review paper briefly provides a concise overview of the benefits and applications of photopolymerization 3D printing technology in optical element preparation The development overview and research progress of materials used for the preparation of optical elements by photopolymerization 3D printing are discussed. Finally, it summarizes the current limitations, challenges, future development prospects, and potential applications in the realm of optical element manufacturing.

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“…Three-dimensional (3D) two-photon nanolithography is an important technology for the manufacturing of 3D structures, [34][35][36] which allows fast and flexible fabrication of micro-and nanooptical elements at nearly 100 nm resolution, [37,38] even complex multilayer broadband diffraction optical elements [39,40] and high aspect-ratio holographic elements. [41] In addition, the throughput of two-photon lithography can be significantly improved by adopting the multifocal strategy [42,43] and varying focusing conditions.…”

Section: Introductionmentioning

confidence: 99%

A Holographic Broadband Achromatic Metalens

Wang,

Liu,

et al. 2023

Laser & Photonics Reviews

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Metalens with nanostructured optical elements are designed to control wavefront shaping at the wavelength‐scale thickness. However, most metalens still suffer from large chromatic aberrations due to phase dispersion, limiting their wide applications for multiple wavelengths. Here, avoiding complex resonant designs or multiple‐layer nanostructures, a simple broadband achromatic metalens by holographic diffraction in the visible spectrum is demonstrated. The hyperbolic phase distributions of multiple discrete wavelengths within a shared aperture and fabricate a broadband achromatic diffractive metalens by flexible direct‐laser‐writing technique is randomly interleaved. The designed polarization‐insensitive metalens modulate the light field by changing the height of the artificial neuron phase units to achieve average focusing efficiencies of 55% in the visible spectrum. This holographic design concept can pave the way to expand achromatic metalenses to multiple spectra.

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Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

Cited by 6 publications

References 34 publications

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Photopolymerized 3D Printing Materials for Optical Elements

A Holographic Broadband Achromatic Metalens

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