ASME 2014 12th International Conference on Nanochannels, Microchannels and Minichannels 2014
DOI: 10.1115/icnmm2014-21540
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Microfluidics Device Manufacturing Using the Technique of 3D Printing

Abstract: The Microfluidics emerged at the end of the 1970’s decade as a result of the use of the technology responsible for the development of micro electromechanical systems (MEMS) that utilized the infrastructure and well-established manufacturing techniques for microelectronics. Initially, silicon was used as substrate for the manufacture of micros systems, however in the last decades it has been replaced by other materials like glass, polymers and ceramic. Currently the most widely used technique in the fabrication… Show more

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Cited by 2 publications
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“…The mask is placed on a photoresist on a silicon wafer, and this photoresist is not exposed to UV light through the open areas of the mask. Depending on the photoresist, either the exposed or the non-exposed areas form the pattern, while the residual photoresist is washed of the wafer, in this way building a master mold [34].…”
Section: Typical 3d Printing Techniquesmentioning
confidence: 99%
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“…The mask is placed on a photoresist on a silicon wafer, and this photoresist is not exposed to UV light through the open areas of the mask. Depending on the photoresist, either the exposed or the non-exposed areas form the pattern, while the residual photoresist is washed of the wafer, in this way building a master mold [34].…”
Section: Typical 3d Printing Techniquesmentioning
confidence: 99%
“…The waxy support used along the channels had to be dissolved and mechanically removed from the channels after printing. In this way, it was possible to prepare microbubbles of very homogenous dimensions, with a standard deviation below 1% [34,42].…”
Section: Photolithographymentioning
confidence: 99%