“…These can be on the size of the cutting tool; for instance, the diameter of small production micro-drills is about 25 μm, and the diameter of micro-milling tools is about 20 μm [17,48,52,53,[55][56][57]. It can have limitations on feature tolerance with error compensation between 250 and 500 nm, or on the flat and round surface produces; for example, roughness of micro-drilled hole walls is about 10-50 nm and roughness of diamond machined surfaces is about 5 nm [17,48,52,53,[55][56][57][58][59][60]. These limitations are a result of several factors such as lack of technologies to fabricate viable and economical smaller cutting tools, accuracy and repeatability of machine tool drives, tool deflections and vibrations (especially in micro-milling process), size effect, and minimum chip thickness requirements in mechanical micro-machining processes, which is always a problem in ductile-and coarse-grained polycrystalline micro-structure metals [48,53,59,61].…”