Microlens Array Fabrication by Using a Microshaper

Lin, Meng‐Ju; Wen, Cheng

doi:10.3390/mi12030244

Cited by 6 publications

(7 citation statements)

References 38 publications

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“…Therefore, it is proven that the aspherical lenses with specific profiles can be successfully fabricated and have good machined properties. It is noticed that the radius of the knife nose used in this work is larger than the reference [ 31 ]. However, the results show that the machining profiles precisely match the designed profiles.…”

Section: Discussionmentioning

confidence: 78%

“…In addition, non-silicon-based micromachining can be used to fabricate microlenses. Using a microshaper mounted on a three-axis computer numerical control (CNC) machine, the spherical profiles of the microlenses can be machined [ 31 ]. The results show that the microlenses have precise profiles and focal lengths.…”

Section: Introductionmentioning

confidence: 99%

“…It is hard to precisely fabricate design profiles with a specific function of the micro-aspherical lens using silicon-based micromachining. However, microshapers mounted on CNC machines with cutter-path planning can scrape precise spherical profiles [ 31 ]. Furthermore, this simple, easy, inexpensive, and quick non-silicon-based micromachining method can make prototypes that need to be cyclically modified without preparing photomasks for lithography and some processes need a vacuum environment.…”

Section: Introductionmentioning

confidence: 99%

“…The machined profiles by microscraping agree well with the design profile equations. Moreover, the roughness, which is important for optical properties, can be diminished using simple polishing [ 31 ]. In this work, the micro-aspherical lenses have moderate roughness of 52 and 44 nm for path line direction and path line transverse direction, respectively.…”

Section: Introductionmentioning

confidence: 99%

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Micro Aspheric Convex Lenses Fabricated by Precise Scraping

Lin

2022

Micromachines

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An easy, fast, inexpensive, and simple method utilizing a microshaper with a very small knife nose is used to fabricate microconvex aspherical lenses. The microshaper is mounted on a computer numerical control (CNC) machine. To achieve an accurately designed profile of the lens surface, a cutter-path planning algorithm with compensation for knife interference is developed. Exerting this algorithm in CNC machining, the microconvex aspheric surface is precisely scraped. To verify the precise machining of the cutter path planning algorithm, three aspheric surfaces of conic sections (ellipsoid, paraboloid, and hyperboloid) are successfully fabricated. The profiles scraped by the microshaper agree well and precisely with the designed theoretical conic section curve. Using a simple polishing method to make the machined surface smoother, the roughness is reduced from 143 and 346 nm to 52 and 44 nm for the path line direction and its transverse direction, respectively. The micro-aspherical lenses have moderate machining properties using a simple polishing method. The results show that the designed profiles of micro-aspheric convex lenses can be machined precisely and efficiently by the microshaper with the cutter-path planning algorithm developed in this work. From the image comparison formed by the aspherical and spherical microlenses, the aspherical lenses provide a better image. It is feasible that the designed profile of the micro-aspherical lenses with specific functions could be machined using the cutter-path planning algorithm developed in this work.

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Section: Discussionmentioning

confidence: 78%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micro Aspheric Convex Lenses Fabricated by Precise Scraping

Lin

2022

Micromachines

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“…Ultraprecision machining is another method used to generate microlens arrays by removing materials from substrates. The single-point diamond turning technology was utilized to fabricate microlens arrays of high quality using a slow slide servo or a fast tool servo, and a tungsten steel microshaper was mounted on a computer numerical control machine to machine a microlens . Surface wrinkling is also an approach to producing microlens arrays, which can be induced by mechanical stretching or solution swelling.…”

Section: Introductionmentioning

confidence: 99%

Fabricating SU-8 Photoresist Microstructures with Controlled Convexity–Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

Zhang

Guo

et al. 2023

Langmuir

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We present a simple, robust, and cheap microfabrication method, based on thermally manipulating capillary action in poly(dimethylsiloxane) (PDMS) microholes, for preparing SU-8 curved microstructures. The microstructure morphology including convexity−concavity and curvature can be controlled via tuning the formation temperature. The convex SU-8 microspherical crowns with a height of 40 μm were formed at 10 °C, whereas the concave SU-8 microspherical crowns with a height of 90 μm were formed at 100 °C. The morphology of the microstructures is dictated by the thermally controlled combination of the pressure difference across the interface, contact angle, and surface tension. The fabricated microstructures with a spherical surface can be used as a microlens array or a mold for producing a microlens array. The clear and uniform images were observed using the generated microlens arrays. The equilibrium morphology of the microstructures can be predicted by numerical simulation, which can lessen the number of experiments and thus the design cost. The proposed method has the potential to find applications in industrial fields.

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High-resolution pressure transducer design and associated circuitry to build a network-ready smart sensor for distributed measurement in oil and gas production wells

Santos

Silva

2022

J Petrol Explor Prod Technol

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Miniaturized single-mode thickness-shear pressure transducer combined with high-temperature SOI, silicon on insulator, integrated circuit technology is proposed as network-ready high-pressure high-resolution smart sensor for distributed data acquisition in oil and gas production wells. The transducer miniaturization is investigated with a full 3D computer model previously developed by the authors to assess the impact of intrinsic losses and various geometrical features on transducer performance. Over the last decades there has been a trend toward size reduction of high-resolution pressure transducer. The implemented model provides insight into the evolution of high-resolution pressure transducers from Hewlett-Packard™ to Quartzdyne™ and beyond. Distributed measurement in production oil wells in extreme harsh environment, such as found in the pre-salt layer, is an unsolved problem. The industry move toward electrified wells offers an opportunity for application of smart sensor technology and power line communications to achieve distributed high-resolution data acquisition.

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Microlens Array Fabrication by Using a Microshaper

Cited by 6 publications

References 38 publications

Micro Aspheric Convex Lenses Fabricated by Precise Scraping

Micro Aspheric Convex Lenses Fabricated by Precise Scraping

Fabricating SU-8 Photoresist Microstructures with Controlled Convexity–Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

High-resolution pressure transducer design and associated circuitry to build a network-ready smart sensor for distributed measurement in oil and gas production wells

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