2013
DOI: 10.1016/j.mee.2013.03.155
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Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

Abstract: We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photopolymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabrica… Show more

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Cited by 3 publications
(2 citation statements)
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“…Photopolymerization has attracted growing attention in recent years . Applications cover different fields in information recording technologies including digital imaging, lithography, manufacturing of optical devices, adhesives, functional printing inks, light sensitive functional coatings, dental composites, composites for mechanical engineering, 3D printing with lasers or digital light processing, holography or controlled polymer synthesis . This requires to include a strong emissive source; that is for many cases a medium pressure Hg lamp emitting in the UV and visible part where small emission lines appear…”
Section: Introductionmentioning
confidence: 99%
“…Photopolymerization has attracted growing attention in recent years . Applications cover different fields in information recording technologies including digital imaging, lithography, manufacturing of optical devices, adhesives, functional printing inks, light sensitive functional coatings, dental composites, composites for mechanical engineering, 3D printing with lasers or digital light processing, holography or controlled polymer synthesis . This requires to include a strong emissive source; that is for many cases a medium pressure Hg lamp emitting in the UV and visible part where small emission lines appear…”
Section: Introductionmentioning
confidence: 99%
“…We already demonstrated in previous works that microlenses prepared with a similar material present interesting optical properties by optical near-field and far-field analysis and FDTD simulations, showing the suitable optical properties of the material in the NIR range. [32,37] Other works are underway to further control the shape and thus focal length of such microlens that would be of interest for VCSEL light collimating. This example also illustrates that the polymerization wavelength can be extended to 850 nm, thanks to the wide absorption spectrum of the dye.…”
Section: Microlenses On a Transparent Substratementioning
confidence: 99%