Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Wang, Yi; Ke, Maolong; Lancaster, M.J.; Chen, Jian

doi:10.1109/lawp.2011.2158285

Cited by 46 publications

(31 citation statements)

References 12 publications

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“…Directional couplers [5] and Butler matrices [13] have been designed to feed 38 GHz and 63 GHz air-filled patch arrays [14]. Slotted waveguide antennas with various feeding configurations have been fabricated at 300 GHz for gain enhancements and beam scanning [15]. Fig.…”

Section: Devicesmentioning

confidence: 99%

Micromachined 3D millimeter-wave and terahertz devices

Wang

Shang

Lancaster

2015

2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-A

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-Micromachining is a very promising technology to manufacture miniature three-dimensional (3D) devices at millimeter-wave (mm-wave) and terahertz (THz) frequencies. After a decade's development, this technology has begun to demonstrate its viability and capability. It has delivered devices with competitive performance to traditional metal machining or electroforming, for coaxial and waveguide structures with submillimeter dimensions. This paper will discuss three strands of work that tackle three main challenges -fabrications, designs and measurements -in this technology. Several passive devices will be presented to illustrate the progress made on the multilayered SU8 techniques. These include guided transmission structures and devices based on rectangular coaxial lines, waveguides and free-space frequency selective surfaces. The concerned frequency covers from 30 GHz to 1 THz.

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Section: Devicesmentioning

confidence: 99%

Micromachined 3D millimeter-wave and terahertz devices

Wang

Shang

Lancaster

2015

2015 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-A

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“…The antenna has been designed using a square aperture PRS in a silver plated SU-8 layer. SU-8 is a UV-sensitive photoresist and able to form structures of high aspect ratio [6][7][8]. The choice of the material is based on the fact that for such high frequencies the required accuracy demands micromachining fabrication for which metalized SU-8 is a suitable solution.…”

Section: Fabricationmentioning

confidence: 99%

“…Firstly, the imperfection of the metal coating could reduce the conductivity of the silver which in turn could result to losses. Particularly, for a surface roughness of 200 nm, 51% reduction of the conductivity has been calculated which leads to a total loss of 0.25 dB [6]. Moreover, in an extreme case scenario where 1% silver conductivity is assumed, for a 15.4-mm-long waveguide wall a loss of 3.5 dB is estimated while another 4.5 dB is attributed to the 11.8 x 11.8 mm 2 metallic walls supporting the PRS layer [6,7].…”

Section: Measurementsmentioning

confidence: 99%

“…Particularly, for a surface roughness of 200 nm, 51% reduction of the conductivity has been calculated which leads to a total loss of 0.25 dB [6]. Moreover, in an extreme case scenario where 1% silver conductivity is assumed, for a 15.4-mm-long waveguide wall a loss of 3.5 dB is estimated while another 4.5 dB is attributed to the 11.8 x 11.8 mm 2 metallic walls supporting the PRS layer [6,7]. Furthermore, the presence of even tiny air gaps between SU-8 layers is one of the main factors of power dissipation for such high frequencies.…”

Section: Measurementsmentioning

confidence: 99%

“…The entire antenna, including a waveguide section feeding the resonant cavity, is implemented using low-cost SU8 photoresist micromachining technology in the facilities that are available at the University of Birmingham [6,7]. This technology has the advantages of high dimensional accuracy, high achievable structure aspect ratio and a capability of large scale production.…”

Section: Introductionmentioning

confidence: 99%

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Micromachined periodic surfaces for planar terahertz antennas

Konstantinidis

Feresidis

Lancaster

2014

The 8th European Conference on Antennas and Propagation (EuCAP 2014)

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In this paper we present micromachined periodic partially reflective surfaces (PRS) employed in the design of planar Fabry-Perot type antenna for terahertz frequencies. The fabrication process is based on micromachining and metalizing multiple SU-8 photoresist layers. A resonant cavity is formed by placing the PRS over a single waveguide-fed aperture in a metallic ground at a distance of about half wavelength. A square aperture array within a metalized SU-8 layer is used as the PRS, and the dimensions are optimized using full wave simulations (CST Microwave Studio TM ). A high gain antenna operating approximately at 284 GHz has been designed and a prototype has been fabricated.

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Substrate Integrated mmW Antennas on LTCC

Chen

Qing

2021

Substrate‐Integrated Millimeter‐Wave Antennas for Next‐Generation Communication and Radar Systems

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Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Cited by 46 publications

References 12 publications

Micromachined 3D millimeter-wave and terahertz devices

Micromachined 3D millimeter-wave and terahertz devices

Micromachined periodic surfaces for planar terahertz antennas

Substrate Integrated mmW Antennas on LTCC

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