Micromachined atomic force microprobe with integrated capacitive read-out

Brügger, J.; Buser, R.A.; Rooij, N. F. de

doi:10.1088/0960-1317/2/3/026

Cited by 63 publications

(32 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Highly selective probe molecules ͑e.g., oligonucleotides, DNA, and antibody͒ are immobilized on said surface of cantilever where they typically form a monolayer and can capture the targeted DNA and protein molecules. MEMS based sensing mechanisms of the piezoresistive scheme, 5 the piezoelectric scheme, 6,7 and the capacitive scheme 8 have been demonstrated a decade ago. In this study we proposed a new silicon cantilever integrated with two-dimensional ͑2D͒ PC based microcavity resonator.…”

mentioning

confidence: 99%

Si nanophotonics based cantilever sensor

Lee

Thillaigovindan

Chen

et al. 2008

Applied Physics Letters

View full text Add to dashboard Cite

We present design and simulation results of a novel nanomechanical sensor using silicon cantilever embedded with a two-dimensional photonic crystal microcavity resonator. Both of resonant wavelength and resonant wavelength shift could be measured as a function of various physical parameters such as applied force, strain, and displacement. Rather linear relationship is derived for strain and resonant wavelength shift. This new nanomechanical sensor shows promising features for biomolecules detection.

show abstract

mentioning

confidence: 99%

Si nanophotonics based cantilever sensor

Lee

Thillaigovindan

Chen

et al. 2008

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

“…The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezoresistive schemes (10,(14)(15)(16)(17), and highspeed scanning systems that rely on arrays of cantilevers featuring piezoelectric excitation and piezoresistive͞piezoelectric readout (10,(18)(19)(20) have been developed. All of those systems, however, require a larger set of desktop equipment because no integrated electronics or functions are provided.…”

mentioning

confidence: 99%

Single-chip mechatronic microsystem for surface imaging and force response studies

Hafizovic

Barrettino

Volden

et al. 2004

Proc. Natl. Acad. Sci. U.S.A.

View full text Add to dashboard Cite

We report on a stand-alone single-chip (7 ؋ 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of <1 nm and a force resolution of <1 nN as shown in the measurement results. The monolithic system represents a paradigm of a mechatronic microsystem that allows for precise and fully controlled mechanical manipulation in the nanoworld.atomic force microscopy ͉ cantilever ͉ complementary metal oxide semiconductor N ew measurement, metrology, and imaging techniques have been pivotal to the rapid development of many branches of science such as materials science, microelectronics, and microbiology, to name a few. The invention of the scanning-tunneling microscope by Binning and Rohrer in 1982 (1) and, in particular, the invention of the atomic force microscope (AFM) in 1986 (2) have established a basis for many findings in various scientific areas over the last years. The AFM has evolved at an exceptional speed from a laboratory prototype to a commercial instrument (consider, e.g., Veeco Instruments, Woodbury, NY) and many other scanning probe techniques (3) have been developed, which will not be further mentioned here. The AFM has been used to measure forces during stretching of DNA strands (4) and rupture forces of single covalent bonds (5) and can be operated in liquids, which enables its use in biological applications (6-8). The AFM also can be used to perform surface manipulations such as lithographic fabrication of a transistor (9, 10) or AFM-based data storage (11,12).Commercially available AFM instruments are rather bulky and have a low throughput because of the serial nature of the involved scanning process and the limited scanning range, which renders the investigation of larger samples rather laborious. The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezore...

show abstract

“…Piezoresistive strain sensors integrated directly into a displacement or force sensor device at the microscale have widely proved useful by the past even though other techniques (piezoelectric [1][2], capacitive [3]) have also been used in this field of applications. Most of the state-of-the-art piezoresistive sensors are operated either in static or dynamic regime by performing a measurement of the variation of the piezoresistance integrated into the sensor structure used as a part of a conventional Wheatstone bridge.…”

Section: Introductionmentioning

confidence: 99%

Piezoresistive signal down mixing for parallel detection of Si-based microcantilevers resonant frequencies

Mathieu

Saya

Nicu

et al. 2005

IEEE Sensors, 2005.

View full text Add to dashboard Cite

We have developed piezoresistive micro-cantilevers to be used as displacement or force sensors associated with selfdetection onboard electronic system. The aim of our work was to realize an integrated and compact detection system without the need of optical read-out scheme. The electronics developed specifically for this application allows, when dynamically operated, to follow each piezoresistive microcantilever resonance frequency (by achieving in the same time an enhancement of the quality factor) with an accuracy of 0,34 Hz.

show abstract

Micromachined atomic force microprobe with integrated capacitive read-out

Cited by 63 publications

References 5 publications

Si nanophotonics based cantilever sensor

Si nanophotonics based cantilever sensor

Single-chip mechatronic microsystem for surface imaging and force response studies

Piezoresistive signal down mixing for parallel detection of Si-based microcantilevers resonant frequencies

Contact Info

Product

Resources

About