Micromachined devices for wireless communications

Nguyen, C.T.-C.; Katehi, L.P.B.; Rebeiz, Gabriel M.

doi:10.1109/5.704281

Cited by 381 publications

(170 citation statements)

References 48 publications

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“…Moreover, integrating individual mechanical elements to realize large-scale systems requires developing methods to couple individual mechanical elements to facilitate new types of coordinated, collective and engineered system response. To date, coupling of only several micromechanical elements has been reported; nonetheless this makes possible micromechanical filters with programmed passband response at radio frequencies [3]. However, the collective response of large arrays of coupled micromechanical devices has not yet been achieved.…”

Section: T He Field Of Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Electrically tunable collective response in a coupled micromechanical array

Buks

Roukes

2002

J. Microelectromech. Syst.

161

194

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Abstract-We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal modes of vibration (phonons). We parametrically excite these collective modes and study the response by measuring the diffraction signal. The results indicate that nonlinear effects strongly affect the dynamics of the system. Further optimization will allow employing similar systems for real-time mechanical spectrum analysis of electrical waveforms.[756]

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Section: T He Field Of Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Electrically tunable collective response in a coupled micromechanical array

Buks

Roukes

2002

J. Microelectromech. Syst.

161

194

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“…Most present day nanomechanical devices are based on thin cantilever beams above a silicon substrate fabricated by photolithography followed by dry and wet chemical etching [310,311,[322][323][324]. Such cantilevers are usually suspended about 100 nm above the silicon substrate [323,324].…”

Section: Appendix a Applications Of The Casimir Force In Nanotechnologymentioning

confidence: 99%

“…Such cantilevers are usually suspended about 100 nm above the silicon substrate [323,324]. The cantilevers move in response to the Casimir force, applied voltages on the substrate, or in response to incoming radio-frequency signals [323,324].…”

Section: Appendix a Applications Of The Casimir Force In Nanotechnologymentioning

confidence: 99%

New developments in the Casimir effect

2001

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We provide a review of both new experimental and theoretical developments in the Casimir effect. The Casimir effect results from the alteration by the boundaries of the zero-point electromagnetic energy. Unique to the Casimir force is its strong dependence on shape, switching from attractive to repulsive as function of the size, geometry and topology of the boundary. Thus the Casimir force is a direct manifestation of the boundary dependence of quantum vacuum. We discuss in depth the general structure of the infinities in the field theory which are removed by a combination of zeta-functional regularization and heat kernel expansion. Different representations for the regularized vacuum energy are given. The Casimir energies and forces in a number of configurations of interest to applications are calculated. We stress the development of the Casimir force for real media including effects of nonzero temperature, finite conductivity of the boundary metal and surface roughness. Also the combined effect of these important factors is investigated in detail on the basis of condensed matter physics and quantum field theory at nonzero temperature. The experiments on measuring the Casimir force are also reviewed, starting first with the older measurements and finishing with a detailed presentation of modern precision experiments. The latter are accurately compared with the theoretical results for real media. At the end of the review we provide the most recent constraints on the corrections to Newtonian gravitational law and other hypothetical long-range interactions at submillimeter range obtained from the Casimir force measurements.

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“…Recent demonstrations of micro-scale high-oscillators and mechanical bandpass filters with area dimensions on the order of 30 m 20 m now bring the first of the above strategies closer to reality [9], [10]. Such devices utilize high-on-chip micromechanical (hereafter referred to as " ") resonators [11], [12] constructed in polycrystalline silicon using integrated-circuit (IC) compatible surface micromachining fabrication techniques, and featuring 's of over 80 000 [13] under vacuum and center frequency temperature coefficients in the range of 10 ppm/ C (several times less with nulling techniques) [14].…”

Section: Introductionmentioning

confidence: 99%