Micromachined H-plane horn antenna manufactured using thick SU-8 photoresist

Murad, Noor Asniza; Lancaster, M.J.; Gardner, P.; Ke, Maolong; Wang, Yi

doi:10.1049/el.2010.1054

Cited by 6 publications

(3 citation statements)

References 7 publications

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“…More recently, Smith et al [18] have demonstrated WR-3.4 band (220-330 GHz) split-block waveguides and cylindrical cavities. The most recently reported work on SU-8 formed split-block waveguides, from the University of Birmingham (U.K.), also showed impressive results at 60 GHz [19], 280 GHz [20], [21], and 650 GHz [22].…”

mentioning

confidence: 93%

3-D Printed Metal-Pipe Rectangular Waveguides

D'Auria

Otter

Hazell

et al. 2015

IEEE Trans. Compon., Packag. Manufact. Technol.

269

135

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This paper first reviews manufacturing technologies for realizing air-filled metal-pipe rectangular waveguides (MPRWGs) and 3-D printing for microwave and millimeter-wave applications. Then, 3-D printed MPRWGs are investigated in detail. Two very different 3-D printing technologies have been considered: low-cost lower-resolution fused deposition modeling for microwave applications and higher-cost high-resolution stereolithography for millimeter-wave applications. Measurements against traceable standards in MPRWGs were performed by the U.K.'s National Physical Laboratory. It was found that the performance of the 3-D printed MPRWGs were comparable with those of standard waveguides. For example, across X-band (8-12 GHz), the dissipative attenuation ranges between 0.2 and 0.6 dB/m, with a worst case return loss of 32 dB; at W-band (75-110 GHz), the dissipative attenuation was 11 dB/m at the band edges, with a worst case return loss of 19 dB. Finally, a high-performance W-band sixth-order inductive iris bandpass filter, having a center frequency of 107.2 GHz and a 6.8-GHz bandwidth, was demonstrated. The measured insertion loss of the complete structure (filter, feed sections, and flanges) was only 0.95 dB at center frequency, giving an unloaded quality factor of 152-clearly demonstrating the potential of this low-cost manufacturing technology, offering the advantages of lightweight rapid prototyping/manufacturing and relatively very low cost when compared with traditional (micro)machining.

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mentioning

confidence: 93%

3-D Printed Metal-Pipe Rectangular Waveguides

D'Auria

Otter

Hazell

et al. 2015

IEEE Trans. Compon., Packag. Manufact. Technol.

269

135

View full text Add to dashboard Cite

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“…SU-8 is capable of constructing threedimensional terahertz waveguide structures with high aspect ratios (greater than 20 : 1), high-dimensional accuracy (tolerance within a few microns), and excellent surface integrity (roughness on the order of tens of nanometres) [24]. The SU-8 process has been utilised to demonstrate a range of millimetre wave and terahertz circuits, including filters [21,[25][26][27][28], waveguides [29,30], Butler matrix with a patch antenna array [31], an orthomode transducer [32], and antennas [33][34][35].…”

Section: Su-8 Micromachiningmentioning

confidence: 99%

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Shang

Yang

Glynn

et al. 2017

IET Microwaves, Antennas & Propagation

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For terahertz systems, rectangular waveguide is an ideal low loss medium for interconnectivity and the construction of passive circuits. A drawback when manufacturing waveguides at submillimeter wavelengths is the demanding tolerances due to small dimensions. For example a WR-3 waveguide (operating between 220 and 325 GHz) has a cross-sectional dimension of just 864 by 432 µm, and higher frequency waveguides get proportionally smaller. An additional challenge is that if using waveguide for passive circuits such as filters, there are additional structures inside the waveguide which are significantly smaller than the waveguide itself. Traditionally, computer numerical control (CNC) milling has been used for waveguides, however at terahertz frequencies this is difficult to utilise. In this paper emerging technologies for terahertz waveguides are compared with conventional CNC solutions. The technologies include the photolithography based polymer etching of waveguides using SU-8 photoresist, and the laser machining of metal. Both have shown promise, and good quality terahertz passive components have been fabricated and measured.

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“…In our previous studies, SU8 photolithography process has been successfully used for fabricating low frequency waveguides, filters, and slot antenna. [3][4][5][6] However, as the frequency increases, there is less space for the manufacturing tolerance and more work is needed to meet the requirements of high-dimensional accuracy, extreme surface smoothness, and low transmission loss.…”

mentioning

confidence: 99%

Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

Tian

Shang

Lancaster

2014

J. Micro/Nanolith. MEMS MOEMS

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Abstract. A microfabricated hollow air-filled waveguide with two back-to-back bends operating in the WR-3 frequency range of 220 to 325 GHz has been successfully fabricated through a multilayered ultrathick SU8 process and has ultralow transmission loss of 0.028 to 0.03 dB∕mm in a performance test. This is the first SU8 constructed hollow waveguide operating at WR-3 frequencies having transmission loss comparable with the state-of-the-art computer numerical control (CNC) machined metal circuits. The multilayered SU8 processing technique has a great advantage of reducing the transmission loss by decreasing the probability of air gaps between SU8 layers. The excellent device performance is also attributed to the precisely controlled layer thickness and ultimately low surface roughness of evaporated silver which only contributes a small part of the microwave signal attenuation.

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Micromachined H-plane horn antenna manufactured using thick SU-8 photoresist

Cited by 6 publications

References 7 publications

3-D Printed Metal-Pipe Rectangular Waveguides

3-D Printed Metal-Pipe Rectangular Waveguides

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

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