2018
DOI: 10.3390/mi9050242
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Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes

Abstract: In this work, a flexible micro-supercapacitor with interdigital planar buckypaper electrodes is presented. A simple fabrication process involving vacuum filtration method and SU-8 molding techniques is proposed to fabricate in-plane interdigital buckypaper electrodes on a membrane filter substrate. The proposed process exhibits excellent flexibility for future integration of the micro-supercapacitors (micro-SC) with other electronic components. The device’s maximum specific capacitance measured using cyclic vo… Show more

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Cited by 12 publications
(4 citation statements)
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“…In addition, Chen et al. [ 301 ] adopted vacuum filtration and SU‐8 molding technologies to fabricate a flexible miro‐supercapacitor assembled by digital plane buckypaper electrodes. The constructed process demonstrates superior flexibility for integrating micro‐SC with other electronic compositions in the future.…”
Section: Recent Progress In Cnfs‐based Electrodes For Flexible Ees De...mentioning
confidence: 99%
“…In addition, Chen et al. [ 301 ] adopted vacuum filtration and SU‐8 molding technologies to fabricate a flexible miro‐supercapacitor assembled by digital plane buckypaper electrodes. The constructed process demonstrates superior flexibility for integrating micro‐SC with other electronic compositions in the future.…”
Section: Recent Progress In Cnfs‐based Electrodes For Flexible Ees De...mentioning
confidence: 99%
“…Carbon nanofilms acquire higher characteristics than carbon nanotubes 26,27 and are primarily fabricated from chemical vapor deposition or vacuum infiltration techniques. 28,29 The carbon nanofilms can be applied in different sectors, such as electromagnetic shielding, 30 electrodes of supercapacitor and battery, [31][32][33] deicing, 34 and infrared sheath, 35 because of higher electrical conductivity. Khosravi and Eslami-Farsani investigated the reinforcing effect of surface-modified multi-walled carbon nanotubes ranging from 0 to 0.5 wt% with a step of 0.1 wt% on flexural characteristics of E-glass/epoxy-iso grid composite panels.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the spatial separation of the electrodes there is no need for a separator and organic binders. This simplifies the design and simulation of the device [2]. Interdigitized PMSCs possess excellent mechanical and electrical characteristics [3].…”
Section: Introductionmentioning
confidence: 99%