Micromachined rotating gyroscope with electromagnetically levitated rotor

Wu, Xiao; Chen, W.-Y.; Zhao, Xiaolin; Zhang, W.-P.

doi:10.1049/el:20061479

Cited by 8 publications

(5 citation statements)

References 1 publication

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“…In the design, the rotation coils, levitation coils and stability coils are separated in position. This can reduce their magnetic field coupling [8].…”

Section: Structure and Principlementioning

confidence: 99%

Development of a micromachined rotating gyroscope with electromagnetically levitated rotor

Wu¹,

Chen²,

Zhao³

et al. 2006

J. Micromech. Microeng.

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A micromachined rotating gyroscope with electromagnetically levitated rotor (MRGELR) is proposed. The working principle of the MRGELR is based on the momentum conservation of a frictionless levitated rotor. The levitation, stability and rotation are analyzed through finite element software. The choice of suitable sized coils and micro-rotor is important for the stable levitation of the micro-rotor. The fabrication process of the MRGELR is detailed based on MEMS technology. For a micro-rotor with a diameter of 2.2 mm and a thickness of 20 µm, a rotation speed of 800 rpm is obtained in atmosphere and 4000 rpm in a vacuum package. The test shows that except for air slip damping, electromagnetic damping is another important factor that resists further increasing of the rotation speed. A resolution of 3 • s −1 is obtained in the experiment when the rotation speed is 4000 rpm.

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“…In the design, the rotation coils, levitation coils and stability coils are separated in position. This can reduce their magnetic field coupling [8].…”

Section: Structure and Principlementioning

confidence: 99%

Development of a micromachined rotating gyroscope with electromagnetically levitated rotor

Wu¹,

Chen²,

Zhao³

et al. 2006

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Examples of devices that utilize vibrations of such plates are synthetic microjets and microspeakers [4]. Another example is micromechanical gyroscopes, which are exclusively of vibrating types, including a double-gimbals structure, a cantilever beam structure, a tuning-fork structure, and a vibrating ring structure [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Electromechanical coupled non-linear vibration of the microplate

Sun

2010

Proceedings of the Institution of Mechanical Engineers, Part C:

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In this article, the non-linear electromechanical coupled dynamic equation of the micro-plate subjected to an electrostatic force is presented. The non-linear free vibration of the electromechanical coupled micro-plate system and the non-linear forced response of the system to voltage excitation are investigated. Non-linear vibration frequencies of the micro-plate for every mode are calculated and compared with the linear natural frequencies. Changes in the non-linear frequencies with the system parameters are presented. The non-linear vibration displacements of the micro-plate at some typical cross-section are calculated for the first three modes. Effects of the system parameters on the displacements are analysed. The changes in the vibration amplitudes with respect to the exciting frequency under different modes and parameters are investigated. Moreover, the effects of the boundary conditions on the electromechanical coupled micro-plate system are also investigated.

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“…In order to meet this trend as well as the requirement of high performance, extremely compact size, low power operation, and low cost angular rate sensors, considerable interest in design and fabrication of micromechanical gyroscopes [1][2] has been attracted. Normally, the micromechanical gyroscope can be driven by electrostatic [3][4], electromagnetic [5][6][7] or piezoelectric [8][9], which can measure the angular rate or the rotation angle by integrating the measured angular rate with respect to time. These gyroscopes have inspiriting parts and sensing parts, so their structures are complex.…”

Section: Introductionmentioning

confidence: 99%

A Novel Non-driven Structural MEMS-based Gyroscope

Wu¹,

Zhang²

2010

JDCTA

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This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results obtained from these tests performed to validate the effectiveness of the gyroscope.

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Micromachined rotating gyroscope with electromagnetically levitated rotor

Cited by 8 publications

References 1 publication

Development of a micromachined rotating gyroscope with electromagnetically levitated rotor

Development of a micromachined rotating gyroscope with electromagnetically levitated rotor

Electromechanical coupled non-linear vibration of the microplate

A Novel Non-driven Structural MEMS-based Gyroscope

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