Micromachined thin film bulk acoustic resonators

Ruby, R.; Merchant, Paul

doi:10.1109/freq.1994.398344

Cited by 107 publications

(42 citation statements)

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“…In this respect, these devices pose an important bottleneck against the ultimate miniaturization and portability of wireless transceivers. For this reason, many research efforts are focused upon strategies for either miniaturizing these components [1]- [5] or eliminating the need for them altogether [6]- [8].…”

Section: Introductionmentioning

confidence: 99%

Frequency-selective MEMS for miniaturized low-power communication devices

Nguyen

1999

IEEE Trans. Microwave Theory Techn.

233

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Section: Introductionmentioning

confidence: 99%

Frequency-selective MEMS for miniaturized low-power communication devices

Nguyen

1999

IEEE Trans. Microwave Theory Techn.

233

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“…However, the acoustic electrodes must be small so as not to introduce excessive capacitive loss. Existing high-performance FBARs (Ruby and Merchant, 1994;Lakin et al, 2001) demonstrate the feasibility of low-loss operation of this class of device around 2GHz. The basic construction of an FBAR is illustrated in Fig.…”

Section: Estimate Of Performance Of Fbars As Hfgw Generatorsmentioning

confidence: 99%

“…The vibrating membrane in an FBAR will also form an ideal vibrating mass for the present application, at slightly higher frequency. Exploratory FBAR devices have been fabricated operating at frequencies up to 7.5GHz (Ruby and Merchant, 1994;Lakin et al, 2001). The FBARS will be arranged in a circle and each vibrating element must vibrate in phase with all the rest.…”

Section: Proposed Generator Conceptmentioning

confidence: 99%

Gravitational Wave Generation and Detection Using Acoustic Resonators and Coupled Resonance Chambers

Woods

Baker²

2005

AIP Conference Proceedings

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Abstract. An experiment is described for the generation and detection of High-Frequency Gravitational Waves (HFGWs) in the laboratory utilizing acoustic piezoelectric resonators for generation, and coupled resonance chambers for detection. Film Bulk Acoustic Resonators or FBARs (similar to those utilized in commercial cellular telephones) energized by magnetrons (similar to those utilized in microwave ovens) are distributed in a ring-shaped array several hundred meters in diameter. The magnetrons are phase locked and are sufficient in number to energize millions of FBARs fabricated on thousands of wafers. The FBARs produce jerks (time rate of change of acceleration or a third time derivative motion imparted to their electrode masses) at a frequency of 2.45GHz. The resulting 4.9GHz HFGW is focused at the center of a segmented or asymmetrical ring of FBARs and is concentrated there by a high-temperature superconductor (HTSC) to generate a HFGW flux on the order of 17mW m -2 to 7W m -2 . A miniature version of an existing HFGW detector designed at INFN Genoa, Italy, consisting of a pair of coupled HTSC-surfaced resonance chambers (about one centimeter in diameter) will be situated in the middle, having their axes perpendicular to the plane of the ring of FBARs. Alternatively, a resonance-loop chamber detector, similar to that developed at Birmingham University, U.K., could be utilized. Details of the experiment and challenges to be met in its design as well as applications to space technology are discussed.

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“…rf mechanical resonators are constantly improving in quality factors, integration capabilities and size, allowing more-efficient, lower-cost wireless communications components, such as filters, duplexers, or mixers. [1][2][3][4] This progress in design and fabrication demands an accompanying development of experimental techniques which are suitable for the electromechanical characterization of the emerging prototypes. Several laser interferometer based methods have been proposed.…”

mentioning

confidence: 99%

“…The resonator considered here is an Agilent Technologies' film bulk acoustic resonator ͑FBAR͒, which consists of a free-standing piezoelectric AlN pentagonal membrane with side lengths about 100 m and overlapping Mo electrodes. 1,3,4 The membrane is designed to have a main thickness vibration mode with a resonance frequency around 1.9 GHz. Before the SAFM experiments, electrical characterization of the particular device under study showed a resonance peak at 1.898 GHz in the power reflection coefficient.…”

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confidence: 99%

Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

Paulo

Liu

Bokor

2005

Applied Physics Letters

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This letter demonstrates the application of scanning acoustic force microscopy for the characterization of film bulk acoustic resonators beyond detection of the gigahertz vibration amplitude and acoustic wave field imaging. We present a method to measure thermal expansion effects on these resonators by modulating the driving signal amplitude and then varying the modulation frequency from a few hertz to several tens of kilohertz. For the particular device considered here, we show the influence of thermal expansion effects on its electromechanical response and the acoustic wave field images. The thermal relaxation time constant of the resonator is measured and compared with a theoretical estimation based on the heat transfer analysis of the system.

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Micromachined thin film bulk acoustic resonators

Cited by 107 publications

References 1 publication

Frequency-selective MEMS for miniaturized low-power communication devices

Frequency-selective MEMS for miniaturized low-power communication devices

Gravitational Wave Generation and Detection Using Acoustic Resonators and Coupled Resonance Chambers

Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

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