Micromachined threshold inertial switches: a review

Abstract

This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.

A hybrid averaging and harmonic balance method for weakly nonlinear asymmetric resonators

“…Recently, the vibrations of micro-and nano-electromechanical resonators have provided a new realm of applications for nonlinear vibrations [1][2][3][4]. Many significant advances have been made in theory [5][6][7], experiments [8][9][10], and applications [11][12][13], including exploring new phenomena uncovered in previously unattainable parameter regimes [14][15][16]. The dynamics of these systems range from simple Duffing responses [17][18][19] to more exotic responses, sometimes involving two or more interacting vibration modes [20][21][22].…”

Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure

“…As a passive sensor, the inertial switch is widely used in remote monitoring areas with limited power supply due to its standby power consumption being zero in the untriggered state [ 1 , 2 , 3 ]. As a “near zero power” sensor, it can also be used to monitor collisions that occur during the transport of particular goods [ 4 , 5 , 6 , 7 ]. Over the years, with the development of intelligent control systems, the inertial switch may be used as an intelligent inertial switch in a vibration system [ 8 ].…”