Micromachining of a piezocomposite transducer using a copper vapor laser

Farlow, R.; Galbraith, W.; Knowles, M. R. H.; Hayward, G.

doi:10.1109/58.920684

Cited by 41 publications

(13 citation statements)

References 3 publications

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“…Holes as small as 1.5 μm can be drilled and tolerances of 70.25 μm can be achieved with diameters in the range 5-200 μm. CVL was used by Farlow et al [41] for the micromachining of 1-3 piezocomposite transducers so that its efficiency can be enhanced by avoiding the inter-pillar resonances which deteriorate the transducer's performance. A kerf width of 13 mm was obtained in 170 mm thick 1-3 piezocomposite transducer.…”

Section: Lbmm Using Copper Vapor Lasers (Cvls)mentioning

confidence: 99%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

237

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Section: Lbmm Using Copper Vapor Lasers (Cvls)mentioning

confidence: 99%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

237

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“…This is especially true for transducers operating above 10 MHz. Although progress has been made in reticulation techniques [12], the wiring of 2-d transducers is difficult to solve in case of reticulated ceramics. Silicon micromachining is quite advanced in the fabrication of deep through holes [13,14] and buried conductor lines needed to realize wiring of 2-d arrays.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

Muralt¹

2005

Electronic Materials: Science and Technology

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A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Best reported results so far is a coupling coefficient k 2 of 6 %. This was achieved with 2 µm thick PZT thin films on a 5 µm thick silicon layer obtained by micromachining from a SOI wafer. The material properties are the most important part for a good performance, however, design contributes as well. Electrode size, layer thickness relation, and border conditions must be dimensioned correctly. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed. 38 Electroceramic-Based MEMS: Fabrication-Technology and Applications

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“…The transfer functions are summed together with weights and the complete transfer function of the compensation filter can be derived from the network shown in Fig. 6 by applying the Millman theorem (11) The resulting function is shown in (12), at the bottom of the previous page. We point out that the two added poles and zeros ( , , , and ) are nearly the same after the approximation carried out by the filter design program and cause negligible effects on the overall frequency response of .…”

Section: Implementation Of the Compensation Filter With Analog Elementioning

confidence: 99%

“…The film was first cut in a mm square element with a blade system and then separated into mm four elements by laser ablation. The laser ablation technology has been already applied to ultrasonic transducers arrays for dividing the sensor into multiple elements [11], [12]. We carried out a laser ablation process on PVDF that provides a separation between elements of about 150 m with negligible effects on the uniformity of the pyroelectric response [13].…”

Section: Characterization Of the Pvdf Four-quadrant Sensormentioning

confidence: 99%

CO/sub 2/ laser pulse monitoring instrument based on PVDF pyroelectric array

et al. 2005

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This paper proposes to extend the use of low-cost, pyroelectric, polyvinylidene fluoride four-quadrant arrays, originally devoted to monitoring the beam point stability of CO 2 laser beams, to the temporal profiling of the same laser pulse providing an instrument that is not commercially available. The advantage of using a single sensor for both types of measurements can be fully exploited if the pyroelectric sensor bandwidth is made almost flat in the typical frequency range (10 Hz-20 kHz) of the signal spectrum generated by a modulated CO 2 laser. In this paper, we present the design of an active analog compensation filter aimed to improve the reconstruction accuracy of the laser pulses and its circuit implementation with a quad operational amplifier for an easy integration of the compensation filter on the same board hosting the sensor. Experimental results obtained with modulated CO 2 laser beams, at pulse repetition rates from 10 to 1000 Hz and variable duty cycle, proved accurate in the laser pulse reconstruction with sensitivity of commercial semiconductor HgCdZnTe sensors.

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Micromachining of a piezocomposite transducer using a copper vapor laser

Cited by 41 publications

References 3 publications

Laser Beam MicroMachining (LBMM) – A review

Laser Beam MicroMachining (LBMM) – A review

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

CO/sub 2/ laser pulse monitoring instrument based on PVDF pyroelectric array

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