2023
DOI: 10.1080/10426914.2023.2290244
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Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities

Anurag Shanu,
Priyaranjan Sharma,
Pradeep Dixit
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Cited by 5 publications
(2 citation statements)
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“…and composites (Carbon Fiber Reinforced Plastics, etc.) [15][16][17][18][19]. Stainless steel, favored for its strength, durability and corrosion resistance, is one of the most popular materials used in micromachining [15].…”
mentioning
confidence: 99%
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“…and composites (Carbon Fiber Reinforced Plastics, etc.) [15][16][17][18][19]. Stainless steel, favored for its strength, durability and corrosion resistance, is one of the most popular materials used in micromachining [15].…”
mentioning
confidence: 99%
“…Micromachined alumina and silicon carbide parts are used in various industrial applications because of their thermal and chemical stability, dielectric strength, hardness, dimensional stability, ability to withstand harsh environments, etc. [18]. Micromachined ceramics allow fine feature formation without occurrence of heat-affected zones or microcracks while maintaining high cut quality.…”
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confidence: 99%