Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser

Qin, Shuijie; Li, Wen J.

doi:10.1007/s003390100943

Cited by 39 publications

(14 citation statements)

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“…The laser can be used to micro-process the fused silica material, which has been studied theoretically and experimentally [15][16][17][18][19]. Aiming at this application of laser, a laser irradiation system model is constructed and simulating calculation is performed in this paper.…”

Section: Model Devicementioning

confidence: 99%

Research on the ablation of fused silica irradiated by Laguerre-Gaussian beam

Qi¹,

Bai²,

Lu³

et al. 2017

IJHT

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The purpose of this study was to investigate the ablation of fused silica under the irradiation of Laguerre Gauss beam. The simulation approach was adopted. The results obtained in this study include... temperature distribution and the ablation boundary morphology on fused silica irradiated under TEM00 TEM01 TEM10 Laguerre Gauss beams. it was found that the accumulation effect of temperature is obvious. The temperature rises after laser pulses irradiating and the focal area exceeds the vaporization temperature, vaporization occurs, and the ablation boundary is formed, and the ablation boundary expands and deepens with the laser pulse. The principal conclusion was that the spatial distribution of laser intensity affects the temperature distribution and the ablation boundary morphology of the material. The findings of this study may serve as the beneficial reference for the process of fused silica

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Section: Model Devicementioning

confidence: 99%

Research on the ablation of fused silica irradiated by Laguerre-Gaussian beam

Qi¹,

Bai²,

Lu³

et al. 2017

IJHT

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“…The fabrication technique of microfluidic devices have also been well developed in the past decade. Various of materials, including silicon [1], quartz [2], glass [3] and polymers [4]were used to produce microfluidic devices with various functions like capillary electrophoresis, micro flow cytometer, micro reactor, micro valve, micro pump and many others.…”

Section: Introductionmentioning

confidence: 99%

A bonding-free process for fabricating integrated microfluidic devices with embedded electrodes utilizing low-cost UV curable resins

Kuo

Yang

Hsieh

et al. 2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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This paper presents a novel bonding-free process for fabricating integrated microfluidic devices with embedded electrodes utilizing low-cost UV curable resins. Commercial available UV glue is sandwiched between two substrates and is used for both the structure material and bonding adhesive. The pattern of micro-fluidic channels is defined using a standard lithography process while two substrates are bonded simultaneously during the exposure procedure. Once the pattern is defined, the un-cured UV glue was removed by vacuum suction to form the sealed microfluidic channel. With this simple approach, conventional bonding processes can be excluded for fabricating sealed microfluidic structures such that the developed method is essential for fabricating microchip devices with embedded electrodes. The thickness of the formed structures can be up to millimeter range and the smallest channel width is around 80 um (aspect ratio = 2). The overall process to fabricate sealed microchip device is less than 10 min since no time-consuming etching and bonding process in the developed process. An innovative micro-reactor integrated with in-channel micro-plasma generator for real-time chemical reaction analysis is fabricated using the developed process. On-line mass-spectrum (MS) detection of an esterfication reaction is successfully demonstrated which resulting a fast, label-free, preparation-free analysis of chemical samples. The developed process has shown its potentials for rapid and low-cost microdevice manufacturing.

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“…Microchannels and mesochannels of many different cross-sectional shapes have been produced in a variety of materials, including metals 15 , fused silica and borosilicate glass 3,16 , silicon 4,6,8,9,11,17 , along with polycrystalline ceramics such as zirconia [18][19][20][21] , alumina [21][22][23] , hydroxyapatite [24][25][26] , and ceramic composites 19,20,22,27 . Microscale and mesoscale channels intended for fluid flow have been investigated in channel cross-sectional shapes that include rectangular 11,[16][17][18]21,22,24 , circular 2,16,20,23 , triangular 4,6 , rhombohedral 12 , and semi-circular channels 3,19,28 . This study focuses on mesoscale channels of rectangular cross-section that are mechanically machined into polycrystalline alumina.…”

Section: Introductionmentioning

confidence: 99%

“…Broad interest in microfluidic channels has been generated by the research and development efforts focused on applications such as the “lab on a chip” technology, where a single integrated circuit combines the functions of sampling, transport, detection, and reporting for the chemical analysis of fluids 1–3 . In addition to the “lab on a chip” work, microfluidic channels are of interest in the active cooling of electronic devices 4–11 as well as for fuel cell applications 12 and in “silicon waferboard” technology 13,14 in which V‐shaped channels in silicon substrates are used to physically align fiber optic cables.…”

Section: Introductionmentioning

confidence: 99%

Machining and Ceramic/Ceramic Joining to Form Internal Mesoscale Channels

Case

Ren

Kwon

et al. 2004

Int J Applied Ceramic Tech

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Ceramics and semiconducting materials with internal channels are crucial in a variety of diverse technologies such as “lab on a chip,” fuel cell applications, and cooling of microelectronics. In this paper, techniques for fabricating internal channels in brittle materials first are reviewed. Then, the mechanical machining of surface channels in 99.99% pure alumina partially sintered at 600°C and 700°C is discussed. After machining, the partially sintered alumina is sintered to a density of about 97% of theoretical and then joined to 96% pure alumina to convert the surface channels into internal channels.

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Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser

Cited by 39 publications

References 0 publications

Research on the ablation of fused silica irradiated by Laguerre-Gaussian beam

Research on the ablation of fused silica irradiated by Laguerre-Gaussian beam

A bonding-free process for fabricating integrated microfluidic devices with embedded electrodes utilizing low-cost UV curable resins

Machining and Ceramic/Ceramic Joining to Form Internal Mesoscale Channels

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