Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm (Invited Paper)

Makimura, Tetsuya; Kenmotsu, Youichi; Miyamoto, Hisao; Uchida, Satoshi; Niino, Hiroyuki; Murakami, Kouichi

doi:10.1117/12.590375

SPIE Proceedings

2005

DOI: 10.1117/12.590375

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Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm (Invited Paper)

Tetsuya Makimura

Youichi Kenmotsu

Hisao Miyamoto

et al.

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Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm (Invited Paper)

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