Guidance, Navigation, and Control Conference 1996
DOI: 10.2514/6.1996-3709
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Micromechanical silicon instrument and systems development at Draper Laboratory

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Cited by 12 publications
(6 citation statements)
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“…There are two main trends in gyro development [1][2][3][4][5], the first is to achieve high accuracy for inertial navigation (e.g. missile, vehicle…), and the second is miniaturisation and integration for low volume applications (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…There are two main trends in gyro development [1][2][3][4][5], the first is to achieve high accuracy for inertial navigation (e.g. missile, vehicle…), and the second is miniaturisation and integration for low volume applications (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…[3], [4], [5]. Figure 5 and 7, are data recently acquired on later generation sensor and electronics and represent the architecture BNA is currently implementing in the automotive yaw rate sensor pilot production.…”
Section: Automotive Applications Specific Resultsmentioning
confidence: 99%
“…Draper has made great strides in simplifying the device fabrication process and realizing fate sensors of increasingly higher performance {2, 3,4,5].…”
Section: Introductionmentioning
confidence: 99%
“…The gyro is made from an etched silicon piece anodically bonded to a glass substrate [6,7]. The glass carries the electrostatic driving and capacitive pickoff plates; the silicon piece attaches at the anchor points, leaving most of the silicon to float.…”
Section: The Micromachined Silicon Tuning Fork Gyromentioning
confidence: 99%