Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

Elshof, Johan E. ten; Khan, Sajid; Göbel, Ole F.

doi:10.1016/j.jeurceramsoc.2010.01.016

Cited by 53 publications

(45 citation statements)

References 202 publications

(264 reference statements)

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“…Nano-imprint lithography (NIL) [1,2] is a highly scalable (lateral resolution finer than 10 nm has been demonstrated [3]), effective, straightforward and low-cost parallel processing technique, which has been extensively used for surface patterning of inorganic and organic solids [4,5]. NIL can be used with hard (quartz, silicon, metal, or tungsten carbide, etc.)…”

Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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Abstract:We demonstrate, for the first time, time-and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of submicrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe2 bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, antireflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing. References and links1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," J. Vac. Sci. Technol. B 14(6), 4129-4133 (1996). 2. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed. 37(5), 550-575 (1998)

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Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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“…Oxygen plasma treatment is commonly used as a technique to clean substrates 4,5,6 and chemically modify surfaces to promote the wetting properties. 4,7 In soft lithographic approaches like micromolding in capillaries (MIMIC) and microtransfer molding (mTM), oxygen plasma is used to increase the surface energy of the PDMS surface to improve the wetting and/or promote the flow of sol-gel precursor solutions in PDMS channels.…”

Section: Resultsmentioning

confidence: 99%

Micro and nanopatterning of functional materials on flexible plastic substrates via site-selective surface modification using oxygen plasma

et al. 2012

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A simple and cost effective methodology for large area micro and nanopatterning of a wide range of functional materials on flexible substrates is presented. A hydrophobic-hydrophilic chemical contrast was patterned on surfaces of various flexible plastic substrates using molds and shadow masks with which selected areas of the substrate surface were shielded from exposure to oxygen plasma. The exposed areas became hydrophilic and were used as templates for site-selective adsorption, electroless deposition and solution phase deposition of functional materials like ZnO, Ag thin films, Au nanoparticles, conducting polymers, titania and ZnO nanowires. The patterned surfaces and functional materials were characterized by scanning electron microscopy, X-ray diffraction and atomic force microscopy.

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“…Metal-oxo species can also be generated through thermal elimination of organic moieties. The elimination of ester, ether, and/or alkyl chloride are well known examples of using "sacrificial" routes to produce metal-oxides through thermally induced non hydrolytic sol-gel chemistry (Escribano, et al, 2008 ;Ohara, 2011 ;Pyun, et al, 2001 ;Shen & Shi, 2010 ;ten Elshof, et al, 2010 ;Yamada, 2009;Yao, Gao & Yu, 2010;Yuan & Muller. 2010).…”

Section: The Inorganic Componentmentioning

confidence: 99%