Micromanufacturing Processes 2012
DOI: 10.1201/b13020-25
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Micromolding—A Soft Lithography Technique

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“…The object of this study are monocrystalline and polycrystalline gold nanorods fabricated via focused ion beam milling into single-crystal gold flakes [38] and via electron beam lithography with subsequent thermal evaporation of a gold film, respectively [see Fig. 1 have a thickness of 30 nm, while a 2-nm chromium layer is used to facilitate adhesion onto the fused silica substrate (thickness 150 μm).…”
mentioning
confidence: 99%
“…The object of this study are monocrystalline and polycrystalline gold nanorods fabricated via focused ion beam milling into single-crystal gold flakes [38] and via electron beam lithography with subsequent thermal evaporation of a gold film, respectively [see Fig. 1 have a thickness of 30 nm, while a 2-nm chromium layer is used to facilitate adhesion onto the fused silica substrate (thickness 150 μm).…”
mentioning
confidence: 99%