2017
DOI: 10.1002/ppap.201700043
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Micron‐scale wedge thin films prepared by plasma enhanced chemical vapor deposition

Abstract: Wedge‐shaped materials are currently employed for optical analyses and sensing applications. In this paper, we present an easy to implement plasma enhanced chemical vapor deposition procedure to grow wedge‐shaped thin films with controlled slope at the scale of few hundred microns. The method relies on the use of few tenths micron height obstacles to alter the laminar flow of precursor gas during deposition and is applied for the fabrication of wedge‐shaped ZnO thin films. Local interference patterns, refracti… Show more

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Cited by 3 publications
(2 citation statements)
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“…Based on the model of the fabricated spiral, an average thickness gradient of −5.3 nm/μm is obtained in this way (see section S2 in the Supporting Information). In 2D films, thickness gradients are often achieved using moving shutters , or plasma-enhanced chemical vapor deposition methods, which create wedge thin films on a scale of tens of micrometers to millimeters. Thus, the highly spatially varying thickness gradients achieved with 3D nanopatterning present a powerful advantage of this 3D fabrication procedure.…”
mentioning
confidence: 99%
“…Based on the model of the fabricated spiral, an average thickness gradient of −5.3 nm/μm is obtained in this way (see section S2 in the Supporting Information). In 2D films, thickness gradients are often achieved using moving shutters , or plasma-enhanced chemical vapor deposition methods, which create wedge thin films on a scale of tens of micrometers to millimeters. Thus, the highly spatially varying thickness gradients achieved with 3D nanopatterning present a powerful advantage of this 3D fabrication procedure.…”
mentioning
confidence: 99%
“…Based on the model of the fabricated spiral, an average thickness gradient of -5.3 nm/µm is obtained in this way (see Supplementary Information S2). In 2D films, thickness gradients are often achieved using moving shutters 30,31 or plasma enhanced chemical vapor deposition methods 32 which create wedge thin films on a scale of tens of microns to millimeters. Thus, the highly localized thickness gradients achieved with 3D nanopatterning present a powerful advantage of this three-dimensional fabrication procedure.…”
mentioning
confidence: 99%