2003
DOI: 10.1002/3527603409
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Microoptics

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Cited by 198 publications
(175 citation statements)
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“…The two latter instruments were developed at the Erlangen-Nürnberg University. According to the lens quality criteria [1] we then decide whether the microlenses are showing a diffraction-limited optical performance. In a final section we assess each fabrication technique on the basis of the measured geometrical and optical characteristics, on the range of materials in which they can be produced, on the feasibility of replicating the microlenses and on the possibility of monolithic integration with other micro-optical components or structures.…”
Section: Discussion Of Various Microlens Fabrication Techniques and Omentioning
confidence: 99%
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“…The two latter instruments were developed at the Erlangen-Nürnberg University. According to the lens quality criteria [1] we then decide whether the microlenses are showing a diffraction-limited optical performance. In a final section we assess each fabrication technique on the basis of the measured geometrical and optical characteristics, on the range of materials in which they can be produced, on the feasibility of replicating the microlenses and on the possibility of monolithic integration with other micro-optical components or structures.…”
Section: Discussion Of Various Microlens Fabrication Techniques and Omentioning
confidence: 99%
“…Before discussing the microlens characteristics we first explain briefly the Rayleigh and Maréchal criterion, of which a more extensive explanation can be found in the literature [1]. The widely used Rayleigh criterion states that a system is diffraction limited as long as the maximum wavefront deviation |ψ max (x)| is less than one-quarter of a wavelength.…”
Section: Discussion and Comparison Of Refractive Microlenses Manufactmentioning
confidence: 99%
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“…However, as the size of the lens decreases by a scale factor S < 1, it can be shown that the aperture diameter D , physical feature size ( x , y , z ) and focal length f scale as ( [2] , Chapter 2):…”
Section: Refractive Opticsmentioning
confidence: 99%
“…Of critical importance for the laser developer are the thickness of the heatspreader and the microlens radius of curvature (ROC), as these parameters define the cavity mode size (largely constant in these short cavities). In practice, the microlens focal length is controlled by the thickness of the spun photoresist, the diameter of the disk pattern to be melted and the etching selectivity between the photoresist and heatspreader material [146].…”
Section: Compact Modulesmentioning
confidence: 99%