2017
DOI: 10.1117/1.oe.57.1.011010
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Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy

Abstract: , "Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy," Opt. Eng. 57(1), 011010 (2017), doi: 10.1117/1.OE.57.1.011010. Abstract. We report on mid-IR spectroscopic measurements performed with rapidly tunable external cavity quantum cascade lasers (EC-QCLs). Fast wavelength tuning in the external cavity is realized by a microoptoelectromechanical systems (MOEMS) grating oscillating at a resonance frequency of about 1 kHz with a deflection amplitude of up to… Show more

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Cited by 21 publications
(11 citation statements)
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“…Using latest generation EC-QCLs, tuning rates of up to 25000 cm –1 s –1 (LaserTune, Block Engineering) and 5000 cm –1 s –1 (MIRcat-QT, Daylight Solutions) can been reached. Furthermore, scanning speeds of up to 600000 cm –1 s –1 have been published employing a resonantly driven micro-opto-electro-mechanical systems (MOEMS) grating. , …”
mentioning
confidence: 99%
“…Using latest generation EC-QCLs, tuning rates of up to 25000 cm –1 s –1 (LaserTune, Block Engineering) and 5000 cm –1 s –1 (MIRcat-QT, Daylight Solutions) can been reached. Furthermore, scanning speeds of up to 600000 cm –1 s –1 have been published employing a resonantly driven micro-opto-electro-mechanical systems (MOEMS) grating. , …”
mentioning
confidence: 99%
“…Recent work showed improved performance of ECQCL over tuning speed covering hundreds of cm −1 within a millisecond. 3032 Combined with fast thermoelectrically cooled mercury cadmium telluride detectors, acquisition of hundreds of spectra per second could be achieved, allowing high resolution mapping of mineral surfaces and point-counting applications where a large number of measurement points is needed on short time scales. Such application is unique to ECQCL-based MIR spectroscopy and shows where it advantageously discerns itself from conventional FT-IR instruments and capabilities.…”
Section: Resultsmentioning
confidence: 99%
“…It should be noted that dynamic deformation of the grating plate was controlled below 392 nm at 10 deflection to ensure its diffraction efficiency. This scanner architecture has been successfully demonstrated in various external-cavity quantum cascade lasers (EC-QCLs), [12][13][14] and the diffraction efficiency of such scanners was reported to be well above 90% for the target working spectrum range, mainly the…”
Section: Out-of-plane Mems Scanning Gratingsmentioning
confidence: 98%