Microprobe Raman spectroscopy of TiN coatings oxidized by solar beam heat treatment

Abstract

Physical vapor deposited TiN coatings oxidized by solar beam heat treatment in air were examined by microprobe Raman spectroscopy. The Raman spectra of TiN treated at 400 °C indicated incipient oxidation by the presence of anatase TiO2 and additionally showed a broadband feature around the forbidden TiN vibrational mode. Inhomogeneous mixtures of rutile TiC>2 and small amounts of anatase polymorph (<10%) were detected for the treatments at 600 °C only during the initial stage of oxidation. Prolonged treatment at 600 °C resulted in a complete anatase-to-rutile conversion. Rutile was identified as the single product of oxidation of the TiN samples treated at 800 °C. Peak analysis of the rutile spectra revealed no substantial spectral shifts, demonstrating an oxide growth of nearly stoichiometric rutile with an estimated composition in the range of Ti02±o.o2-The Raman scattered light intensity could be correlated with the rutile layer thickness.

A Raman-scattering study on the interface structure of nanolayered TiAlN∕TiN and TiN∕NbN multilayer thin films grown by reactive dc magnetron sputtering

“…35 Scattering in the acoustic range is primarily determined by the vibrations of the Ti ions and that in the optic range by the vibrations of the N ions. 27 The Raman spectrum of TiAlN coating consists of two broadbands centered at 277 ͑FWHM= 55 cm −1 ͒ and 640 cm −1 ͑FWHM= 69 cm −1 ͒. The Raman spectra of TiN and TiAlN are almost similar except that the broadband associated with optical transitions shifts to higher frequencies in the latter case.…”

“…24,25 An excellent review on the Raman spectroscopy of vibrations in semiconductor superlattices has been written by Jusserand and Cardona. 26 In the field of physical-vapor-deposited ͑PVD͒ hard coatings Raman spectroscopy has been used to study oxidation, 27,28 wear debris, 29 and stress. 30 There has been a little work on the Raman spectroscopy studies on the transition-metal nitride-based hard superlattices.…”

Study of TiOxNy thin film selective surfaces produced by ion assisted deposition

“…16 O and 14 N areal densities ͑atoms/cm 2 ) were determined by nuclear reaction analysis ͑NRA͒ 12 using 900 keV deuteron induced ͑d,p͒ and ͑d,␣) reactions observed at 150°C. 16 O and 14 N areal densities ͑atoms/cm 2 ) were determined by nuclear reaction analysis ͑NRA͒ 12 using 900 keV deuteron induced ͑d,p͒ and ͑d,␣) reactions observed at 150°C.…”

Structural transformations in TiAlSiCN coatings in the temperature range 900–1600 °C

“…resulted from optical modes in the range 500-650 cm À1 (TO and LO) [36]. The scattering in the acoustic range is determined primarily by the vibration of heavy ions near nonmetallic vacancies, and that in the optical range arises from vibration of light atoms adjacent to metallic vacancies [37].…”