In laser ablation inductively coupled plasma mass spectrometry (LA-ICPMS) the aerosol analyzed by ICPMS is generated by evaporating (ablating) a solid sample by means of a high-energy pulsed laser beam, which is focused on the sample surface. The ability to concentrate laser energy into an area as small as 4 μm in diameter for current equipment enables spatially resolved elemental analysis of major, minor, and trace elements and isotope ratio measurements in almost any solid material [1][2][3][4][5]. The development of this technique started in 1985 when Alan Gray presented the very first attempt at quantitative analysis of geological materials using LA-ICPMS [6]. The general setup of LA-ICPMS has not undergone fundamental changes since this initial configuration, while technical improvements of laser sources, beam delivery optics, and ICPMS instrumentation led to better performance and an increasing range of applications until today. These applications range from geochemical studies over material sciences and technology into biochemical and even medical applications. Forensic studies of many kinds are routinely carried out, and quality control of production processes is an increasing field where this technique is employed. In general, LA-ICPMS is a valuable tool in elemental trace and ultra trace analysis whenever spatially resolved determinations are required or when sample consumption shall be minimized. Even for bulk analysis, LA-ICPMS may be considered as it eliminates the need for sample digestion and minimizes the occurrence of solvent-based spectral interferences, which can be a severe limitation in ICPMS when using conventional solution nebulization.LA-ICPMS basically consists of the following components:• The laser source and beam delivery. Different pulsed lasers are currently available for LA-ICPMS, which primarily differ in wavelength, pulse duration, and pulse energy as well as in beam geometry and energy distribution. The beam delivery in most cases consists of energy adjustment, steering and shaping elements, and an objective for focusing and observation. Beam shaping is carried out toHandbook of Spectroscopy, Second Edition. Edited by Günter Gauglitz and David S. Moore.